Inventor · disambiguated record
Shinji Nagai
Also filed as: NAGAI SHINJI
63 granted patents·14 pending applications·608 citations·filing 1992–2024
99Inventor score
Top patents by PatentIndex Score
77 records- 0195US5216371ABattery pack including measuring and indicatingRICOH KK·Filed 1992·Granted Jun 1, 1993·158 cites·7 claims
- 0294US8158959B2Extreme ultraviolet light source apparatusASAYAMA TAKESHI·Filed 2010·Granted Apr 17, 2012·14 cites·16 claims
- 0394US7999241B2Extreme ultraviolet light source apparatusGIGAPHOTON INC·Filed 2009·Granted Aug 16, 2011·40 cites·12 claims
- 0493US8586954B2Extreme ultraviolet light source apparatusASAYAMA TAKESHI·Filed 2012·Granted Nov 19, 2013·13 cites·17 claims
- 0593US8558202B2Extreme ultraviolet light source apparatusYANAGIDA TATSUYA·Filed 2011·Granted Oct 15, 2013·14 cites·24 claims
- 0691US8872142B2Extreme ultraviolet light generation apparatusNAGAI SHINJI·Filed 2012·Granted Oct 28, 2014·9 cites·40 claims
- 0791US7903700B2Narrow-spectrum laser deviceKOMATSU MFG CO LTD·Filed 2005·Granted Mar 8, 2011·17 cites·3 claims
- 0890US8003963B2Extreme ultraviolet light source apparatusGIGAPHOTON INC·Filed 2009·Granted Aug 23, 2011·21 cites·23 claims
- 0989US10136510B2Extreme ultraviolet light generation deviceGIGAPHOTON INC·Filed 2017·Granted Nov 20, 2018·4 cites·14 claims
- 1089US8067756B2Extreme ultraviolet light source apparatusUENO YOSHIFUMI·Filed 2009·Granted Nov 29, 2011·24 cites·12 claims
- 1188US8530869B2Extreme ultraviolet light source apparatusNAGAI SHINJI·Filed 2011·Granted Sep 10, 2013·7 cites·22 claims
- 1287US7186973B2Ion trap/time-of-flight mass analyzing apparatus and mass analyzing methodHITACHI HIGH TECH CORP·Filed 2005·Granted Mar 6, 2007·11 cites·10 claims
- 1385US10764986B2Extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2016·Granted Sep 1, 2020·2 cites·20 claims
- 1485US8242474B2Extreme ultraviolet light generation apparatusNAGAI SHINJI·Filed 2011·Granted Aug 14, 2012·6 cites·25 claims
- 1583US8624208B2Extreme ultraviolet light generation systemNAGAI SHINJI·Filed 2011·Granted Jan 7, 2014·8 cites·26 claims
- 1683US8530870B2Extreme ultraviolet light source apparatusKAKIZAKI KOUJI·Filed 2011·Granted Sep 10, 2013·5 cites·26 claims
- 1783US6839373B1Ultra-narrow band flourine laser apparatusKOMATSU MFG CO LTD·Filed 2000·Granted Jan 4, 2005·24 cites·9 claims
- 1882US8436328B2Extreme ultraviolet light source apparatusYANAGIDA TATSUYA·Filed 2009·Granted May 7, 2013·14 cites·16 claims
- 1981US9465307B2Cleaning method for EUV light generation apparatusGIGAPHOTON INC·Filed 2013·Granted Oct 11, 2016·3 cites·6 claims
- 2080US10268119B2Extreme ultraviolet light generating deviceGIGAPHOTON INC·Filed 2018·Granted Apr 23, 2019·2 cites·10 claims
- 2179US10532386B2Continuous-cast slab, method and apparatus of manufacturing the same, and method and apparatus of manufacturing thick steel plateNIPPON STEEL & SUMITOMO METAL CORP·Filed 2016·Granted Jan 14, 2020·1 cites·17 claims
- 2279US8629417B2Extreme ultraviolet light generation apparatusNAGAI SHINJI·Filed 2012·Granted Jan 14, 2014·4 cites·13 claims
- 2378US8569723B2Extreme ultraviolet light source apparatusNAGAI SHINJI·Filed 2011·Granted Oct 29, 2013·4 cites·12 claims
- 2477US7115862B2Mass spectroscope and method of calibrating the sameHITACHI HIGH TECH CORP·Filed 2004·Granted Oct 3, 2006·10 cites·8 claims
- 2576US10314152B2Extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2016·Granted Jun 4, 2019·2 cites·18 claims
- 2675US6628682B1Wavelength detection device for line-narrowed laser apparatus and ultra line-narrowed fluorine laser apparatusKOMATSU MFG CO LTD·Filed 2000·Granted Sep 30, 2003·15 cites·8 claims
- 2773US9510433B2Extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2014·Granted Nov 29, 2016·2 cites·6 claims
- 2871US8901524B2Extreme ultraviolet light source apparatusGIGAPHOTON INC·Filed 2013·Granted Dec 2, 2014·2 cites·21 claims
- 2971US8507883B2Extreme ultraviolet light source apparatusENDO AKIRA·Filed 2009·Granted Aug 13, 2013·8 cites·19 claims
- 3071US6683303B2Ion trap mass spectrometer and spectrometryHITACHI LTD·Filed 2002·Granted Jan 27, 2004·8 cites·15 claims
- 3170US8503499B2Gas discharge chamberNAGAI SHINJI·Filed 2010·Granted Aug 6, 2013·2 cites·6 claims
- 3270US8165181B2Polarization purity control device and gas laser apparatus provided with the sameNAGAI SHINJI·Filed 2009·Granted Apr 24, 2012·2 cites·6 claims
- 3369US8841641B2Extreme ultraviolet light source apparatusGIGAPHOTON INC·Filed 2013·Granted Sep 23, 2014·2 cites·16 claims
- 3469US8399867B2Extreme ultraviolet light source apparatusENDO AKIRA·Filed 2009·Granted Mar 19, 2013·7 cites·22 claims
- 3568US7381948B2Mass spectroscope and method of calibrating the sameHITACHI HIGH TECH CORP·Filed 2006·Granted Jun 3, 2008·1 cites·8 claims
- 3668US6839293B2Word-line deficiency detection method for semiconductor memory deviceFUJITSU LTD·Filed 2002·Granted Jan 4, 2005·14 cites·5 claims
- 3768US6633033B2Apparatus for mass spectrometry on an ion-trap methodHITACHI LTD·Filed 2000·Granted Oct 14, 2003·6 cites·16 claims
- 3867US8513630B2Extreme ultraviolet light source apparatusUENO YOSHIFUMI·Filed 2011·Granted Aug 20, 2013·2 cites·6 claims
- 3966US8902948B2Polarization purity control device and gas laser apparatus provided with the sameGIGAPHOTON INC·Filed 2013·Granted Dec 2, 2014·1 cites·1 claims
- 4066US7989764B2Ion trap mass spectrometry methodHITACHI HIGH TECH CORP·Filed 2007·Granted Aug 2, 2011·1 cites·7 claims
- 4165US8891574B2Polarization purity control device and gas laser apparatus provided with the sameNAGAI SHINJI·Filed 2012·Granted Nov 18, 2014·1 cites·6 claims
- 4265US8855167B2Gas discharge chamberGIGAPHOTON INC·Filed 2013·Granted Oct 7, 2014·1 cites·1 claims
- 4363US7965756B2Optical element for gas laser and gas laser apparatus using the sameGIGAPHOTON INC·Filed 2009·Granted Jun 21, 2011·1 cites·8 claims
- 4463US6573492B2Mass spectrometric analysis method and apparatus using the methodHITACHI LTD·Filed 2000·Granted Jun 3, 2003·5 cites·12 claims
- 4562US6636297B2Vacuum ultraviolet laser wavelength measuring apparatusGIGAPHOTON INC·Filed 2001·Granted Oct 21, 2003·9 cites·7 claims
- 4659US7075069B2Apparatus for mass spectrometry on an ion-trap methodHITACHI LTD·Filed 2003·Granted Jul 11, 2006·3 cites·20 claims
- 4758US11940736B2Tin trap device, extreme ultraviolet light generation apparatus, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2021·Granted Mar 26, 2024·0 cites·20 claims
- 4858US11042102B2Extreme ultraviolet light generation device and electronic device manufacturing methodGIGAPHOTON INC·Filed 2020·Granted Jun 22, 2021·0 cites·20 claims
- 4957US2025193992A1Extreme ultraviolet light generation apparatus and electronic device manufacturing methodGIGAPHOTON INC·Filed 2024·Application pending·0 cites
- 5056US8748853B2Chamber apparatusNAGAI SHINJI·Filed 2012·Granted Jun 10, 2014·1 cites·8 claims
Showing the top 50 of 77 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →