Inventor · disambiguated record
Shigeru Odagiri
Also filed as: ODAGIRI SHIGERU
4 granted patents·544 citations·filing 1992–1997
84Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0195US5329732AWafer polishing method and apparatusSPEEDFAM CORP·Filed 1992·Granted Jul 19, 1994·262 cites·14 claims
- 0292US5498199AWafer polishing method and apparatusSPEEDFAM CORP·Filed 1994·Granted Mar 12, 1996·198 cites·5 claims
- 0383US5498196AWafer polishing method and apparatusSPEEDFAM CORP·Filed 1994·Granted Mar 12, 1996·72 cites·3 claims
- 0449USRE37622EWafer polishing method and apparatusSPEEDFAM IPEC CORP·Filed 1997·Granted Apr 2, 2002·12 cites·62 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →