Inventor · disambiguated record
Shin Oowada
Also filed as: OOWADA SHIN
29 granted patents·9 pending applications·1,080 citations·filing 1999–2025
98Inventor score
Top patents by PatentIndex Score
38 records- 0199US7109483B2Method for inspecting substrate, substrate inspecting system and electron beam apparatusEBARA CORP·Filed 2001·Granted Sep 19, 2006·159 cites·9 claims
- 0298US9368314B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2014·Granted Jun 14, 2016·38 cites·10 claims
- 0398US7601972B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2007·Granted Oct 13, 2009·49 cites·8 claims
- 0498US6593152B2Electron beam apparatus and method of manufacturing semiconductor device using the apparatusEBARA CORP·Filed 2001·Granted Jul 15, 2003·109 cites·60 claims
- 0597US7297949B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2006·Granted Nov 20, 2007·28 cites·6 claims
- 0697US7244932B2Electron beam apparatus and device fabrication method using the electron beam apparatusEBARA CORP·Filed 2001·Granted Jul 17, 2007·74 cites·51 claims
- 0797US7223973B2Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using formerEBARA CORP·Filed 2005·Granted May 29, 2007·38 cites·10 claims
- 0897US7135676B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2001·Granted Nov 14, 2006·61 cites·12 claims
- 0997US6855929B2Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using formerEBARA CORP·Filed 2001·Granted Feb 15, 2005·106 cites·55 claims
- 1096US7439502B2Electron beam apparatus and device production method using the electron beam apparatusEBARA CORP·Filed 2007·Granted Oct 21, 2008·23 cites·7 claims
- 1196US7417236B2Sheet beam-type testing apparatusEBARA CORP·Filed 2006·Granted Aug 26, 2008·20 cites·18 claims
- 1296US7049585B2Sheet beam-type testing apparatusEBARA CORP·Filed 2001·Granted May 23, 2006·55 cites·7 claims
- 1395US8822919B2Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using formerKIMBA TOSHIFUMI·Filed 2011·Granted Sep 2, 2014·15 cites·10 claims
- 1495US7411191B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2007·Granted Aug 12, 2008·20 cites·4 claims
- 1594US7241993B2Inspection system by charged particle beam and method of manufacturing devices using the systemTOSHIBA KK·Filed 2001·Granted Jul 10, 2007·54 cites·12 claims
- 1694US7095022B2Electron beam apparatus and method of manufacturing semiconductor device using the apparatusNIKON CORP·Filed 2001·Granted Aug 22, 2006·48 cites·13 claims
- 1793US7928378B2Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using formerEBARA CORP·Filed 2008·Granted Apr 19, 2011·17 cites·11 claims
- 1893US7408175B2Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using formerEBARA CORP·Filed 2007·Granted Aug 5, 2008·19 cites·9 claims
- 1992US7829871B2Sheet beam-type testing apparatusEBARA CORP·Filed 2008·Granted Nov 9, 2010·10 cites·7 claims
- 2091US8053726B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2008·Granted Nov 8, 2011·11 cites·11 claims
- 2191US7129485B2Electron beam apparatus and method of manufacturing semiconductor device using the apparatusEBARA CORP·Filed 2004·Granted Oct 31, 2006·30 cites·8 claims
- 2290US8803103B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2013·Granted Aug 12, 2014·6 cites·7 claims
- 2390US7247848B2Electron beam apparatus and method of manufacturing semiconductor device using the apparatusEBARA CORP·Filed 2003·Granted Jul 24, 2007·28 cites·16 claims
- 2490US7109484B2Sheet beam-type inspection apparatusEBARA CORP·Filed 2004·Granted Sep 19, 2006·23 cites·6 claims
- 2588US7888642B2Electron beam apparatus and method of manufacturing semiconductor device using the apparatusEBARA CORP·Filed 2008·Granted Feb 15, 2011·9 cites·9 claims
- 2687US7423267B2Electron beam apparatus and method of manufacturing semiconductor device using the apparatusEBARA CORP·Filed 2006·Granted Sep 9, 2008·8 cites·5 claims
- 2783US8368031B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2011·Granted Feb 5, 2013·3 cites·7 claims
- 2878US7745784B2Electron beam apparatus and method of manufacturing semiconductor device using the apparatusEBARA CORP·Filed 2007·Granted Jun 29, 2010·4 cites·8 claims
- 2966US2025372348A1Radio-frequency power source and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 3063US2024203692A1Plasma processing apparatus and plasma control methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 3161US2008121804A1Method for inspecting substrate, substrate inspecting system and electronEBARA CORP·Filed 2007·Application pending·0 cites
- 3261US2024186114A1Plasma processing apparatus and assembly method of resonator array structureTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 3360US2008173815A1Electron beam apparatus and device production method using the electron beam apparatusEBARA CORP·Filed 2008·Application pending·0 cites
- 3459US2014367570A1Substrate inspection method and a substrate processing methodEBARA CORP·Filed 2014·Application pending·0 cites
- 3556US2007045536A1Method for inspecting substrate, substrate inspecting system and electron beam apparatusEBARA CORP·Filed 2006·Application pending·0 cites
- 3655US2025231116A1Method for observing surfaceTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 3752US6409585B1Polishing apparatus and holder for holding an article to be polishedEBARA CORP·Filed 1999·Granted Jun 25, 2002·15 cites·48 claims
- 3849US2024318014A1Pattern forming method and plasma processing methodTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →