Inventor · disambiguated record
Sha Rin
Also filed as: Rin Sha
3 granted patents·1 pending application·2 citations·filing 2016–2021
50Inventor score
Technology areasH10P
Files withADVANCED MICRO FABRICATION EQUIPMENT INC CHINA3ADVANCED MICRO FABRICATION EQUIPMENT INC SHANGHAI1
Top patents by PatentIndex Score
4 records- 0169US12094695B2Multi-zone temperature control plasma reactorADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2019·Granted Sep 17, 2024·2 cites·8 claims
- 0261US12309891B2Control method for multi-zone active-matrix temperature control in plasma processing apparatusADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2021·Granted May 20, 2025·0 cites·16 claims
- 0350US12046458B2Multi-zone heating apparatus, bottom electrode assembly, plasma processing apparatus, and temperature adjusting methodADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2021·Granted Jul 23, 2024·0 cites·24 claims
- 0445US2017186592A1Multi-zone active-matrix temperature control system and temperature control method, and electrostatic chuck and plasma processing apparatus apply thereofADVANCED MICRO-FABRICATION EQUIPMENT INC SHANGHAI·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →