Inventor · disambiguated record
Shunichi Shibuki
Also filed as: SHIBUKI SHUNICHI
4 granted patents·3 pending applications·9 citations·filing 2001–2013
63Inventor score
Top patents by PatentIndex Score
7 records- 0165US8490031B2Method, apparatus and program for adjusting feature dimensions to compensate for planarizing effects in the generation of mask data and manufacturing semiconductor deviceIZUHA KYOKO·Filed 2010·Granted Jul 16, 2013·2 cites·12 claims
- 0251US6749486B2Chemical-mechanical polishing device, damascene wiring forming device, and damascene wiring forming methodTOKYO ELECTRON LTD·Filed 2001·Granted Jun 15, 2004·7 cites·7 claims
- 0344US2007190911A1Polishing pad and forming methodSONY CORP·Filed 2007·Application pending·0 cites
- 0441US9435643B2Presumably defective portion decision apparatus, presumably defective portion decision method, fabrication method for semiconductor device and programSONY CORP·Filed 2013·Granted Sep 6, 2016·0 cites·15 claims
- 0538US2006199373A1Method of manufacturing semiconductor deviceMIYAJIMA HIDESHI·Filed 2006·Application pending·0 cites
- 0631US2005153633A1Polishing pad, polishing apparatus, and polishing methodFiled 2003·Application pending·0 cites
- 0728US8829635B2Solid-state imaging device, manufacturing method thereof, electronic apparatus, and semiconductor deviceSHIBUKI SHUNICHI·Filed 2012·Granted Sep 9, 2014·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →