Inventor · disambiguated record
Shailendra Srivastava
Also filed as: SRIVASTAVA SHAILENDRA
17 granted patents·5 pending applications·19 citations·filing 2013–2024
89Inventor score
Top patents by PatentIndex Score
22 records- 0196US11956883B2Methods and apparatus for controlling RF parameters at multiple frequenciesAPPLIED MATERIALS INC·Filed 2022·Granted Apr 9, 2024·3 cites·18 claims
- 0294US11570879B2Methods and apparatus for controlling RF parameters at multiple frequenciesAPPLIED MATERIALS INC·Filed 2020·Granted Jan 31, 2023·3 cites·18 claims
- 0389US11501993B2Semiconductor substrate supports with improved high temperature chuckingAPPLIED MATERIALS INC·Filed 2020·Granted Nov 15, 2022·2 cites·20 claims
- 0487US10600624B2System and method for substrate processing chambersAPPLIED MATERIALS INC·Filed 2018·Granted Mar 24, 2020·5 cites·22 claims
- 0586US12110590B2Faceplate having a curved surfaceAPPLIED MATERIALS INC·Filed 2023·Granted Oct 8, 2024·0 cites·18 claims
- 0683US11851759B2Faceplate having a curved surfaceAPPLIED MATERIALS INC·Filed 2022·Granted Dec 26, 2023·0 cites·16 claims
- 0783US11530482B2Faceplate having a curved surfaceAPPLIED MATERIALS INC·Filed 2020·Granted Dec 20, 2022·1 cites·20 claims
- 0880US10636628B2Method for cleaning a process chamberAPPLIED MATERIALS INC·Filed 2017·Granted Apr 28, 2020·2 cites·13 claims
- 0977US12159785B2Dynamic multi zone flow control for a processing systemAPPLIED MATERIALS INC·Filed 2023·Granted Dec 3, 2024·0 cites·8 claims
- 1076US12087555B2Method and system for cleaning a process chamberAPPLIED MATERIALS INC·Filed 2022·Granted Sep 10, 2024·0 cites·12 claims
- 1176US11339475B2Film stack overlay improvementAPPLIED MATERIALS INC·Filed 2019·Granted May 24, 2022·2 cites·17 claims
- 1275US2025006487A1Dynamic multi zone flow control for a processing systemAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1366US11532462B2Method and system for cleaning a process chamberAPPLIED MATERIALS INC·Filed 2020·Granted Dec 20, 2022·0 cites·20 claims
- 1466US2025361614A1Increased life substrate support assemblyAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1564US11798803B2Dynamic multi zone flow control for a processing systemAPPLIED MATERIALS INC·Filed 2020·Granted Oct 24, 2023·0 cites·14 claims
- 1655US9148941B2Thermal monitor for an extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2013·Granted Sep 29, 2015·1 cites·28 claims
- 1755US2019382889A1Technique to enable high temperature clean for rapid processing of wafersAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 1853US12094689B2Switchable delivery for semiconductor processing systemAPPLIED MATERIALS INC·Filed 2020·Granted Sep 17, 2024·0 cites·14 claims
- 1952US11776835B2Power supply signal conditioning for an electrostatic chuckAPPLIED MATERIALS INC·Filed 2020·Granted Oct 3, 2023·0 cites·20 claims
- 2048US11946686B2Thermally stable flow meters for precision fluid deliveryAPPLIED MATERIALS INC·Filed 2019·Granted Apr 2, 2024·0 cites·21 claims
- 2145US2021047730A1Chamber configurations for controlled depositionAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 2241US2019338420A1Pressure skew system for controlling center-to-edge pressure changeAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →