Inventor · disambiguated record
Shruti Vivek Thombare
Also filed as: THOMBARE SHRUTI · THOMBARE SHRUTI VIVEK
13 granted patents·14 pending applications·79 citations·filing 2014–2025
90Inventor score
Files withLAM RES CORP27
Top patents by PatentIndex Score
27 records- 0198US12074029B2Molybdenum depositionLAM RES CORP·Filed 2022·Granted Aug 27, 2024·8 cites·11 claims
- 0296US10777453B2Low resistivity films containing molybdenumLAM RES CORP·Filed 2019·Granted Sep 15, 2020·18 cites·20 claims
- 0396US10510590B2Low resistivity films containing molybdenumLAM RES CORP·Filed 2018·Granted Dec 17, 2019·26 cites·20 claims
- 0492US12327762B2Molybdenum fillLAM RES CORP·Filed 2020·Granted Jun 10, 2025·3 cites·25 claims
- 0592US12148623B2Deposition of tungsten on molybdenum templatesLAM RES CORP·Filed 2019·Granted Nov 19, 2024·6 cites·28 claims
- 0686US10229826B2Systems and methods for forming low resistivity metal contacts and interconnects by reducing and removing metallic oxideLAM RES CORP·Filed 2017·Granted Mar 12, 2019·4 cites·19 claims
- 0786US9478411B2Method to tune TiOx stoichiometry using atomic layer deposited Ti film to minimize contact resistance for TiOx/Ti based MIS contact scheme for CMOSLAM RES CORP·Filed 2014·Granted Oct 25, 2016·7 cites·17 claims
- 0885US2024297075A1Low resistivity films containing molybdenumLAM RES CORP·Filed 2024·Application pending·0 cites
- 0983US9478438B2Method and apparatus to deposit pure titanium thin film at low temperature using titanium tetraiodide precursorLAM RES CORP·Filed 2014·Granted Oct 25, 2016·5 cites·25 claims
- 1082US12203168B2Metal depositionLAM RES CORP·Filed 2020·Granted Jan 21, 2025·1 cites·20 claims
- 1181US12274047B2Line bending control for memory applicationsLAM RES CORP·Filed 2023·Granted Apr 8, 2025·0 cites·21 claims
- 1281US2025115998A1Metal depositionLAM RES CORP·Filed 2024·Application pending·0 cites
- 1379US2025029840A1Molybdenum depositionLAM RES CORP·Filed 2024·Application pending·0 cites
- 1477US2025234503A1Line bending control for memory applicationsLAM RES CORP·Filed 2025·Application pending·0 cites
- 1576US2024401196A1Deposition of pure metal filmsLAM RES CORP·Filed 2024·Application pending·0 cites
- 1675US12331396B2Systems and methods for homogenous intermixing of precursors in alloy atomic layer depositionLAM RES CORP·Filed 2023·Granted Jun 17, 2025·0 cites·14 claims
- 1775US2022223471A1Low resistivity films containing molybdenumLAM RES CORP·Filed 2022·Application pending·0 cites
- 1873US11864372B2Line bending control for memory applicationsLAM RES CORP·Filed 2019·Granted Jan 2, 2024·1 cites·22 claims
- 1970US2020365456A1Low resistivity films containing molybdenumLAM RES CORP·Filed 2020·Application pending·0 cites
- 2069US2023290680A1Self-limiting growthLAM RES CORP·Filed 2023·Application pending·0 cites
- 2169US2025285920A1Molybdenum fillLAM RES CORP·Filed 2025·Application pending·0 cites
- 2266US2022389579A1Deposition of pure metal filmsLAM RES CORP·Filed 2022·Application pending·0 cites
- 2354US11827976B2Systems and methods for homogenous intermixing of precursors in alloy atomic layer depositionLAM RES CORP·Filed 2018·Granted Nov 28, 2023·0 cites·13 claims
- 2454US2021140043A1Deposition of pure metal filmsLAM RES CORP·Filed 2019·Application pending·0 cites
- 2552US2024110279A1Atomic layer deposition with multiple uniformly heated charge volumesLAM RES CORP·Filed 2021·Application pending·0 cites
- 2652US2020402846A1Self-limiting growthLAM RES CORP·Filed 2018·Application pending·0 cites
- 2745US2024047269A1Molybdenum deposition in featuresLAM RES CORP·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →