Inventor · disambiguated record
Shota Yoshimura
Also filed as: YOSHIMURA SHOTA
8 granted patents·9 pending applications·4 citations·filing 2010–2024
74Inventor score
Top patents by PatentIndex Score
17 records- 0175US11380545B2Processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Jul 5, 2022·2 cites·13 claims
- 0263US12488990B2Etching method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Dec 2, 2025·0 cites·16 claims
- 0363US10984258B2Vehicle traveling environment detecting apparatus and vehicle traveling controlling systemSUBARU CORP·Filed 2019·Granted Apr 20, 2021·1 cites·8 claims
- 0461US9373520B2Multilayer film etching method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Jun 21, 2016·1 cites·12 claims
- 0560US12456626B2Etching method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Oct 28, 2025·0 cites·20 claims
- 0654US2024071728A1Substrate processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0753US2024071727A1Substrate processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0852US2024212987A1Gas supply system, gas control system, plasma processing apparatus, and gas control methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0951US2022351981A1Etching method, plasma processing apparatus, substrate processing system, and programTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 1050US2022097328A1Method for manufacturing tireTOYO TIRE CORP·Filed 2020·Application pending·0 cites
- 1146US10933805B2Automatic driving systemSUBARU CORP·Filed 2019·Granted Mar 2, 2021·0 cites·8 claims
- 1246US9034698B2Semiconductor device manufacturing methodTOKYO ELECTRON LTD·Filed 2014·Granted May 19, 2015·0 cites·7 claims
- 1345US2021335598A1Processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 1440US2015096882A1Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 1538US8969210B2Plasma etching apparatus, plasma etching method, and semiconductor device manufacturing methodNOZAWA TOSHIHISA·Filed 2011·Granted Mar 3, 2015·0 cites·6 claims
- 1638US2012241090A1Plasma processing apparatusYOSHIKAWA JUN·Filed 2012·Application pending·0 cites
- 1737US2012026593A1Microlens array manufacturing method, and microlens arrayYOSHIMURA SHOTA·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →