Inventor · disambiguated record
Siddharth P. Nagarkatti
Also filed as: NAGARKATTI SIDDHARTH · NAGARKATTI SIDDHARTH P
22 granted patents·3 pending applications·1,039 citations·filing 2003–2018
96Inventor score
Top patents by PatentIndex Score
25 records- 0198US9449793B2Systems, methods and apparatus for choked flow element extractionSHAJII ALI·Filed 2010·Granted Sep 20, 2016·469 cites·16 claims
- 0298US7764140B2Radio frequency power delivery systemMKS INSTR INC·Filed 2006·Granted Jul 27, 2010·139 cites·28 claims
- 0397US8624501B2Measuring and controlling parameters of a plasma generatorNAGARKATTI SIDDHARTH P·Filed 2010·Granted Jan 7, 2014·50 cites·31 claims
- 0496US8633782B2Radio frequency power delivery systemNAGARKATTI SIDDHARTH P·Filed 2010·Granted Jan 21, 2014·64 cites·17 claims
- 0595US7615120B2Pulsed mass flow delivery system and methodMKS INSTR INC·Filed 2006·Granted Nov 10, 2009·64 cites·15 claims
- 0694US8710926B2Radio frequency power delivery systemNAGARKATTI SIDDHARTH P·Filed 2012·Granted Apr 29, 2014·64 cites·16 claims
- 0794US8659335B2Method and system for controlling radio frequency powerNAGARKATTI SIDDHARTH·Filed 2009·Granted Feb 25, 2014·62 cites·9 claims
- 0886US7477711B2Synchronous undersampling for high-frequency voltage and current measurementsMKS INSTR INC·Filed 2005·Granted Jan 13, 2009·18 cites·5 claims
- 0985US7829353B2Pulsed mass flow delivery system and methodMKS INSTR INC·Filed 2006·Granted Nov 9, 2010·18 cites·6 claims
- 1079US7628860B2Pulsed mass flow delivery system and methodMKS INSTR INC·Filed 2004·Granted Dec 8, 2009·29 cites·19 claims
- 1174US8037896B2Pressure regulation in remote zonesMKS INSTR INC·Filed 2006·Granted Oct 18, 2011·4 cites·9 claims
- 1272US8692466B2Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generatorBENZERROUK SOUHEIL·Filed 2009·Granted Apr 8, 2014·3 cites·44 claims
- 1369US8999104B2Systems, methods and apparatus for separate plasma source controlSHAJII ALI·Filed 2010·Granted Apr 7, 2015·2 cites·16 claims
- 1468US6986359B2System and method for controlling pressure in remote zonesMKS INSTR INC·Filed 2004·Granted Jan 17, 2006·18 cites·35 claims
- 1568US6857323B1Two phase flow sensor using tomography techniquesMKS INSTR INC·Filed 2003·Granted Feb 22, 2005·14 cites·26 claims
- 1667US9967965B2Distributed, concentric multi-zone plasma source systems, methods and apparatusLAM RES CORP·Filed 2012·Granted May 8, 2018·2 cites·18 claims
- 1767US7072743B2Semiconductor manufacturing gas flow divider system and methodMKS INSTR INC·Filed 2004·Granted Jul 4, 2006·10 cites·31 claims
- 1864US8689822B2Pressure regulation in remote zonesSHAJII ALI·Filed 2011·Granted Apr 8, 2014·1 cites·6 claims
- 1963US10283325B2Distributed multi-zone plasma source systems, methods and apparatusSHAJII ALI·Filed 2012·Granted May 7, 2019·1 cites·16 claims
- 2058US9155181B2Distributed multi-zone plasma source systems, methods and apparatusSHAJII ALI·Filed 2010·Granted Oct 6, 2015·1 cites·12 claims
- 2156US2008179948A1Radio frequency power delivery systemMKS INSTR INC·Filed 2008·Application pending·0 cites
- 2256US2018228015A1Distributed, Non-Concentric Multi-Zone Plasma Source Systems, Methods and ApparatusLAM RES CORP·Filed 2018·Application pending·0 cites
- 2351US10424460B2Systems, methods and apparatus for choked flow element extractionLAM RES CORP·Filed 2016·Granted Sep 24, 2019·0 cites·14 claims
- 2451US7120542B2Flow monitoring systemMKS INSTR INC·Filed 2004·Granted Oct 10, 2006·6 cites·22 claims
- 2537US2005217346A1Flow measurement calibrationNAGARKATTI SIDDHARTH P·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →