Inventor · disambiguated record
Silvio Preti
Also filed as: PRETI SILVIO · PRETI SILVIO ROBERTO MARIO
7 granted patents·14 pending applications·2 citations·filing 2016–2025
70Inventor score
Top patents by PatentIndex Score
21 records- 0184US11377754B2Epitaxial deposition reactor with reflector external to the reaction chamber and cooling method of a susceptor and substratesLPE SPA·Filed 2017·Granted Jul 5, 2022·2 cites·11 claims
- 0272US11834753B2Reactor for epitaxial deposition with a heating inductor with movable turnsLPE SPA·Filed 2021·Granted Dec 5, 2023·0 cites·4 claims
- 0371US2025140597A1Substrate support device for a reaction chamber of an epitaxial reactor with gas flow rotation, reaction chamber and epitaxial reactorLPE SPA·Filed 2024·Application pending·0 cites
- 0469US12435420B2Reaction chamber for an epitaxial reactor of semiconductor material with non-uniform longitudinal section and reactorLPE SPA·Filed 2019·Granted Oct 7, 2025·0 cites·11 claims
- 0564US2025084559A1Reactor for epitaxial deposition of semiconductor material on substrates with sliding sledge for reaction chamberLPE SPA·Filed 2024·Application pending·0 cites
- 0664US2025137122A1Two-chamber reactor for epitaxial deposition of semiconductor material on substratesLPE SPA·Filed 2024·Application pending·0 cites
- 0762US2019256999A1Heating method for a reactor for epitaxial deposition and reactor for epitaxial depositionLPE SPA·Filed 2017·Application pending·0 cites
- 0858US2025122616A1Apparatus for manufacturing semiconductor devicesLPE SPA·Filed 2024·Application pending·0 cites
- 0957US2025038027A1Wafer loading and unloading system for an epitaxial reactor and an epitaxial reactorLPE SPA·Filed 2024·Application pending·0 cites
- 1056US12195877B2Substrate support device for a reaction chamber of an epitaxial reactor with gas flow rotation, reaction chamber and epitaxial reactorLPE SPA·Filed 2020·Granted Jan 14, 2025·0 cites·11 claims
- 1156US2024417851A1Apparatus for manufacturing semiconductor devicesLPE SPA·Filed 2024·Application pending·0 cites
- 1253US12331423B2Reaction chamber for a deposition reactor with interspace and lower closing element and reactorLPE SPA·Filed 2020·Granted Jun 17, 2025·0 cites·24 claims
- 1352US2024271319A1Reaction chamber with covering system and epitaxial reactorLPE SPA·Filed 2022·Application pending·0 cites
- 1450US2025313991A1Method and system for obtaining high-quality cubic silicon carbideLPE S PA·Filed 2025·Application pending·0 cites
- 1550US2025290225A1Moncrystalline coatings for reactor parts suitable for the epitaxial deposition of semiconductor filmsLPE SPA·Filed 2025·Application pending·0 cites
- 1649US2022025519A1Deposition reactor with inductors and electromagnetic shieldsLPE SPA·Filed 2019·Application pending·0 cites
- 1742US2023197499A1Tool for handling substrates with overhead screen and relevant handling methods and epitaxial reactorLPE SPA·Filed 2021·Application pending·0 cites
- 1838US12325932B2Method for CVD deposition of n-type doped silicon carbide and epitaxial reactorLPE SPA·Filed 2021·Granted Jun 10, 2025·0 cites·20 claims
- 1937US10815585B2Susceptor with substrate clamped by underpressure, and reactor for epitaxial depositionLPE SPA·Filed 2017·Granted Oct 27, 2020·0 cites·15 claims
- 2033US2021189594A1Inductively heatable susceptor and epitaxial deposition reactorLPE SPA·Filed 2017·Application pending·0 cites
- 2132US2017121846A1Susceptor with asymmetric recesses, reactor for epitaxial deposition and production methodLPE SPA·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →