Inventor · disambiguated record
Siegfried Alexander Tromp
Also filed as: TROMP SIEGFRIED ALEXANDER
23 granted patents·3 pending applications·33 citations·filing 2012–2025
93Inventor score
Top patents by PatentIndex Score
26 records- 0190US9983489B2Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiationASML NETHERLANDS BV·Filed 2015·Granted May 29, 2018·5 cites·21 claims
- 0289US9785055B2Object holder and lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Oct 10, 2017·7 cites·20 claims
- 0386US9915877B2Object holder and lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Mar 13, 2018·3 cites·20 claims
- 0482US9256139B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2012·Granted Feb 9, 2016·3 cites·20 claims
- 0581US10192772B2Substrate table and lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Jan 29, 2019·4 cites·20 claims
- 0677US10895808B2Substrate holder, a lithographic apparatus and method of manufacturing devicesASML NETHERLANDS BV·Filed 2016·Granted Jan 19, 2021·2 cites·19 claims
- 0776US10527092B2Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Jan 7, 2020·2 cites·20 claims
- 0875US2025334889A1Substrate support, substrate table and methodASML NETHERLANDS BV·Filed 2025·Application pending·0 cites
- 0973US8908143B2Substrate holder, lithographic apparatus, and device manufacturing method involving a heater and/or temperature sensorTROMP SIEGFRIED ALEXANDER·Filed 2012·Granted Dec 9, 2014·3 cites·20 claims
- 1072US11664264B2Lithographic apparatus, method for unloading a substrate and method for loading a substrateASML NETHERLANDS BV·Filed 2016·Granted May 30, 2023·2 cites·24 claims
- 1171US12287586B2Stage system, lithographic apparatus, method for positioning and device manufacturing methodASML NETHERLANDS BV·Filed 2023·Granted Apr 29, 2025·0 cites·20 claims
- 1270US10018924B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2016·Granted Jul 10, 2018·1 cites·20 claims
- 1369US11898601B2Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2021·Granted Feb 13, 2024·0 cites·20 claims
- 1466US11579533B2Substrate holder, a lithographic apparatus and method of manufacturing devicesASML NETHERLANDS BV·Filed 2021·Granted Feb 14, 2023·0 cites·20 claims
- 1566US11385547B2Extraction body for lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted Jul 12, 2022·0 cites·20 claims
- 1665US11860552B2Stage system, lithographic apparatus, method for positioning and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Jan 2, 2024·1 cites·23 claims
- 1764US12405539B2Substrate support and substrate tableASML NETHERLANDS BV·Filed 2021·Granted Sep 2, 2025·0 cites·20 claims
- 1864US11098759B2Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2020·Granted Aug 24, 2021·0 cites·20 claims
- 1964US2023260820A1Lithographic apparatus, method for unloading a substrate and method for loading a substrateASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 2060US10481502B2Object holder and lithographic apparatusASML NETHERLANDS BV·Filed 2018·Granted Nov 19, 2019·0 cites·20 claims
- 2159US9298104B2Substrate holder, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Mar 29, 2016·0 cites·20 claims
- 2254US12315756B2Method of manufacturing a substrate support for a lithographic apparatus, substrate table, lithographic apparatus, device manufacturing method, method of useASML NETHERLANDS BV·Filed 2020·Granted May 27, 2025·0 cites·20 claims
- 2354US10705426B2Extraction body for lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Jul 7, 2020·0 cites·20 claims
- 2446US2024186145A1Surface treatment device and methodASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 2543US10018926B2Lithographic apparatus and method of manufacturing a lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Jul 10, 2018·0 cites·20 claims
- 2638US10599049B2Substrate holder, a lithographic apparatus and method of manufacturing devicesASML NETHERLANDS BV·Filed 2016·Granted Mar 24, 2020·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →