Inventor · disambiguated record
Soo Young Choi
Also filed as: CHOI SOO Y · CHOI SOO YOUNG
176 granted patents·107 pending applications·5,191 citations·filing 1999–2025
99Inventor score
Top patents by PatentIndex Score
283 records- 0199US8328939B2Diffuser plate with slit valve compensationCHOI SOO YOUNG·Filed 2007·Granted Dec 11, 2012·743 cites·24 claims
- 0299US8173228B2Particle reduction on surfaces of chemical vapor deposition processing apparatusCHOI SOO YOUNG·Filed 2006·Granted May 8, 2012·122 cites·18 claims
- 0399US8074599B2Plasma uniformity control by gas diffuser curvatureCHOI SOO YOUNG·Filed 2005·Granted Dec 13, 2011·253 cites·33 claims
- 0499US6825134B2Deposition of film layers by alternately pulsing a precursor and high frequency power in a continuous gas flowAPPLIED MATERIALS INC·Filed 2002·Granted Nov 30, 2004·595 cites·33 claims
- 0598US8721791B2Showerhead support structure for improved gas flowTINER ROBIN L·Filed 2011·Granted May 13, 2014·516 cites·15 claims
- 0698US8083853B2Plasma uniformity control by gas diffuser hole designCHOI SOO YOUNG·Filed 2004·Granted Dec 27, 2011·753 cites·106 claims
- 0798US7785672B2Method of controlling the film properties of PECVD-deposited thin filmsAPPLIED MATERIALS INC·Filed 2004·Granted Aug 31, 2010·247 cites·20 claims
- 0898US6942753B2Gas distribution plate assembly for large area plasma enhanced chemical vapor depositionAPPLIED MATERIALS INC·Filed 2003·Granted Sep 13, 2005·810 cites·23 claims
- 0996US11742362B2Hybrid high-k dielectric material film stacks comprising zirconium oxide utilized in display devicesAPPLIED MATERIALS INC·Filed 2021·Granted Aug 29, 2023·2 cites·14 claims
- 1096US9382621B2Ground return for plasma processesCHOI SOO YOUNG·Filed 2010·Granted Jul 5, 2016·27 cites·33 claims
- 1196US8174400B2Frequency monitoring to detect plasma process abnormalityPARK BEOM SOO·Filed 2011·Granted May 8, 2012·324 cites·15 claims
- 1296US7582515B2Multi-junction solar cells and methods and apparatuses for forming the sameAPPLIED MATERIALS INC·Filed 2007·Granted Sep 1, 2009·36 cites·23 claims
- 1396US7514936B2Detection and suppression of electrical arcingAPPLIED MATERIALS INC·Filed 2007·Granted Apr 7, 2009·59 cites·13 claims
- 1495US7429410B2Diffuser gravity supportAPPLIED MATERIALS INC·Filed 2005·Granted Sep 30, 2008·32 cites·15 claims
- 1595US7292045B2Detection and suppression of electrical arcingAPPLIED MATERIALS INC·Filed 2005·Granted Nov 6, 2007·45 cites·24 claims
- 1694US12362149B2Film stress control for plasma enhanced chemical vapor depositionAPPLIED MATERIALS INC·Filed 2023·Granted Jul 15, 2025·1 cites·20 claims
- 1794US9269923B2Barrier films for thin film encapsulationAPPLIED MATERIALS INC·Filed 2014·Granted Feb 23, 2016·12 cites·14 claims
- 1894US8795793B2Gas diffusion shower head design for large area plasma enhanced chemical vapor depositionCHOI SOO YOUNG·Filed 2008·Granted Aug 5, 2014·16 cites·20 claims
- 1993US8075690B2Diffuser gravity supportKELLER ERNST·Filed 2008·Granted Dec 13, 2011·24 cites·12 claims
- 2092US11699628B2Nitrogen-rich silicon nitride films for thin film transistorsAPPLIED MATERIALS INC·Filed 2021·Granted Jul 11, 2023·2 cites·20 claims
- 2192US9431631B2Plasma curing of PECVD HMDSO film for OLED applicationsAPPLIED MATERIALS INC·Filed 2014·Granted Aug 30, 2016·5 cites·20 claims
- 2292US8724064B2Fringe field switching mode liquid crystal display device and method of fabricating the sameSON OCK SOO·Filed 2010·Granted May 13, 2014·17 cites·10 claims
- 2392US7902991B2Frequency monitoring to detect plasma process abnormalityAPPLIED MATERIALS INC·Filed 2007·Granted Mar 8, 2011·24 cites·28 claims
- 2491US10262837B2Plasma uniformity control by gas diffuser hole designAPPLIED MATERIALS INC·Filed 2015·Granted Apr 16, 2019·5 cites·14 claims
- 2591US9397318B2Method for hybrid encapsulation of an organic light emitting diodeAPPLIED MATERIALS INC·Filed 2013·Granted Jul 19, 2016·8 cites·22 claims
- 2691US8343592B2Asymmetrical RF drive for electrode of plasma chamberAPPLIED MATERIALS INC·Filed 2008·Granted Jan 1, 2013·13 cites·13 claims
- 2791US7972470B2Asymmetric grounding of rectangular susceptorAPPLIED MATERIALS INC·Filed 2007·Granted Jul 5, 2011·10 cites·37 claims
- 2891US7754294B2Method of improving the uniformity of PECVD-deposited thin filmsAPPLIED MATERIALS INC·Filed 2008·Granted Jul 13, 2010·14 cites·17 claims
- 2991US6355108B1Film deposition using a finger type shadow frameAPPLIED KOMATSU TECHNOLOGY INC·Filed 1999·Granted Mar 12, 2002·90 cites·27 claims
- 3090US10043641B2Methods and apparatus for processing chamber cleaning end point detectionAPPLIED MATERIALS INC·Filed 2016·Granted Aug 7, 2018·7 cites·20 claims
- 3190US9449809B2Interface adhesion improvement methodCHOI YOUNG JIN·Filed 2013·Granted Sep 20, 2016·11 cites·22 claims
- 3290US8883269B2Thin film deposition using microwave plasmaWON TAE KYUNG·Filed 2011·Granted Nov 11, 2014·6 cites·5 claims
- 3390US8877301B2Plasma processing including asymmetrically grounding a susceptorFURUTA GAKU·Filed 2011·Granted Nov 4, 2014·4 cites·18 claims
- 3490US8147614B2Multi-gas flow diffuserWHITE JOHN M·Filed 2010·Granted Apr 3, 2012·5 cites·12 claims
- 3590US7125758B2Controlling the properties and uniformity of a silicon nitride film by controlling the film forming precursorsAPPLIED MATERIALS INC·Filed 2004·Granted Oct 24, 2006·47 cites·23 claims
- 3689US9530990B2Plasma curing of PECVD HMDSO film for OLED applicationsAPPLIED MATERIALS INC·Filed 2016·Granted Dec 27, 2016·2 cites·18 claims
- 3788US9200368B2Plasma uniformity control by gas diffuser hole designCHOI SOO YOUNG·Filed 2011·Granted Dec 1, 2015·6 cites·95 claims
- 3888US7741144B2Plasma treatment between deposition processesAPPLIED MATERIALS INC·Filed 2008·Granted Jun 22, 2010·14 cites·15 claims
- 3987US11854771B2Film stress control for plasma enhanced chemical vapor depositionAPPLIED MATERIALS INC·Filed 2021·Granted Dec 26, 2023·1 cites·15 claims
- 4087US11094508B2Film stress control for plasma enhanced chemical vapor depositionAPPLIED MATERIALS INC·Filed 2018·Granted Aug 17, 2021·3 cites·20 claims
- 4187US11037851B2Nitrogen-rich silicon nitride films for thin film transistorsAPPLIED MATERIALS INC·Filed 2019·Granted Jun 15, 2021·3 cites·17 claims
- 4287US9634039B2SiON gradient conceptAPPLIED MATERIALS INC·Filed 2016·Granted Apr 25, 2017·3 cites·21 claims
- 4387US8962567B2Eye drop composition for prevention and treatment of ophthalmic diseases containing fusion protein of FK506 binding proteinCHOI SOO YOUNG·Filed 2011·Granted Feb 24, 2015·7 cites·10 claims
- 4487US8906813B2SiOx process chemistry development using microwave plasma CVDWON TAE KYUNG·Filed 2013·Granted Dec 9, 2014·8 cites·13 claims
- 4587US8225496B2Automated integrated solar cell production line composed of a plurality of automated modules and tools including an autoclave for curing solar devices that have been laminatedBACHRACH ROBERT Z·Filed 2008·Granted Jul 24, 2012·29 cites·4 claims
- 4686US2024347551A1Hybrid high-k dielectric material film stacks comprising zirconium oxide utilized in display devicesAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4785US12080725B2Hybrid high-K dielectric material film stacks comprising zirconium oxide utilized in display devicesAPPLIED MATERIALS INC·Filed 2023·Granted Sep 3, 2024·0 cites·20 claims
- 4885US10991916B2Thin-film encapsulationAPPLIED MATERIALS INC·Filed 2018·Granted Apr 27, 2021·2 cites·20 claims
- 4985US10087524B2Showerhead support structure for improved gas flowAPPLIED MATERIALS INC·Filed 2014·Granted Oct 2, 2018·5 cites·20 claims
- 5085US9677177B2Substrate support with quadrantsAPPLIED MATERIALS INC·Filed 2014·Granted Jun 13, 2017·6 cites·19 claims
Showing the top 50 of 283 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →