Inventor · disambiguated record
Soichi Owa
Also filed as: OWA SOICHI
91 granted patents·13 pending applications·1,934 citations·filing 1993–2021
99Inventor score
Top patents by PatentIndex Score
104 records- 0199US7483119B2Exposure method, substrate stage, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2005·Granted Jan 27, 2009·76 cites·102 claims
- 0299US7388649B2Exposure apparatus and method for producing deviceNIKON CORP·Filed 2005·Granted Jun 17, 2008·121 cites·50 claims
- 0399US7023610B2Ultraviolet laser apparatus and exposure apparatus using sameNIKON CORP·Filed 2003·Granted Apr 4, 2006·495 cites·89 claims
- 0498US7589820B2Exposure apparatus and method for producing deviceNIKON CORP·Filed 2006·Granted Sep 15, 2009·49 cites·18 claims
- 0598US7542128B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2007·Granted Jun 2, 2009·46 cites·23 claims
- 0698US6590698B1Ultraviolet laser apparatus and exposure apparatus using sameNIKON CORP·Filed 2000·Granted Jul 8, 2003·162 cites·87 claims
- 0796US8792081B2Controller for optical device, exposure method and apparatus, and method for manufacturing deviceOWA SOICHI·Filed 2008·Granted Jul 29, 2014·19 cites·34 claims
- 0896US7453550B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2007·Granted Nov 18, 2008·35 cites·40 claims
- 0995US8089616B2Pattern forming method and apparatus, exposure method and apparatus, and device manufacturing method and deviceOWA SOICHI·Filed 2009·Granted Jan 3, 2012·17 cites·28 claims
- 1094US8174668B2Exposure apparatus and method for producing deviceKOBAYASHI NAOYUKI·Filed 2007·Granted May 8, 2012·11 cites·78 claims
- 1193US8760617B2Exposure apparatus and method for producing deviceNIKON CORP·Filed 2013·Granted Jun 24, 2014·4 cites·95 claims
- 1293US7098992B2Light source unit and wavelength stabilizing control method, exposure apparatus and exposure method, method of making exposure apparatus, and device manufacturing method and deviceNIKON CORP·Filed 2003·Granted Aug 29, 2006·90 cites·82 claims
- 1393US7050149B2Exposure apparatus and exposure methodNIKON CORP·Filed 2004·Granted May 23, 2006·48 cites·33 claims
- 1492US10527956B2Temperature controlled heat transfer frame for pellicleNIKON CORP·Filed 2018·Granted Jan 7, 2020·4 cites·35 claims
- 1592US9551942B2Controller for optical device, exposure method and apparatus, and method for manufacturing deviceNIKON CORP·Filed 2016·Granted Jan 24, 2017·3 cites·12 claims
- 1692US6831731B2Projection optical system and an exposure apparatus with the projection optical systemNIKON CORP·Filed 2002·Granted Dec 14, 2004·45 cites·70 claims
- 1791US9651871B2Spatial light modulator, exposure apparatus, and method for manufacturing deviceNIKON CORP·Filed 2016·Granted May 16, 2017·3 cites·24 claims
- 1891US6707529B1Exposure method and apparatusNIKON CORP·Filed 2000·Granted Mar 16, 2004·39 cites·44 claims
- 1991US5838709AUltraviolet laser sourceNIKON CORP·Filed 1996·Granted Nov 17, 1998·90 cites·54 claims
- 2090US9291814B2Spatial light modulator, exposure apparatus, and method for manufacturing deviceOWA SOICHI·Filed 2011·Granted Mar 22, 2016·9 cites·34 claims
- 2190US6653024B1Photomask, aberration correction plate, exposure apparatus, and process of production of microdeviceNIKON CORP·Filed 2000·Granted Nov 25, 2003·36 cites·30 claims
- 2288US9946162B2Controller for optical device, exposure method and apparatus, and method for manufacturing deviceNIKON CORP·Filed 2016·Granted Apr 17, 2018·2 cites·12 claims
- 2388US6970228B1Exposure method and systemNIKON CORP·Filed 1999·Granted Nov 29, 2005·63 cites·30 claims
- 2487US8384877B2Exposure apparatus and method for producing deviceNIKON CORP·Filed 2007·Granted Feb 26, 2013·4 cites·30 claims
- 2587US8169592B2Exposure apparatus and method for producing deviceKOBAYASHI NAOYUKI·Filed 2008·Granted May 1, 2012·4 cites·83 claims
- 2687US8130363B2Exposure apparatus and method for producing deviceKOBAYASHI NAOYUKI·Filed 2008·Granted Mar 6, 2012·4 cites·36 claims
- 2787US8072576B2Exposure apparatus and method for producing deviceKOBAYASHI NAOYUKI·Filed 2007·Granted Dec 6, 2011·4 cites·38 claims
- 2886US8605252B2Exposure apparatus, exposure method, and method for producing deviceKOBAYASHI NAOYUKI·Filed 2012·Granted Dec 10, 2013·3 cites·17 claims
- 2985US9019467B2Exposure method, substrate stage, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2013·Granted Apr 28, 2015·2 cites·35 claims
- 3085US8040491B2Exposure method, substrate stage, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2008·Granted Oct 18, 2011·4 cites·16 claims
- 3184US6614504B2Exposure apparatus, exposure method, and device manufacturing methodNIKON CORP·Filed 2001·Granted Sep 2, 2003·31 cites·18 claims
- 3284US6088379AUltraviolet laser apparatus and semiconductor exposure apparatusNIKON CORP·Filed 1998·Granted Jul 11, 2000·59 cites·26 claims
- 3383US10761431B2Spatial light modulator, method of driving same, and exposure method and apparatusNIKON CORP·Filed 2019·Granted Sep 1, 2020·2 cites·12 claims
- 3483US10261421B2Controller for optical device, exposure method and apparatus, and method for manufacturing deviceNIKON CORP·Filed 2018·Granted Apr 16, 2019·1 cites·12 claims
- 3583US9316921B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2013·Granted Apr 19, 2016·2 cites·46 claims
- 3683US9310520B2Optical material, optical element, and method for manufacturing sameOWA SOICHI·Filed 2011·Granted Apr 12, 2016·6 cites·40 claims
- 3783US9239525B2Pattern forming method and apparatus, exposure method and apparatus, and device manufacturing method and deviceOWA SOICHI·Filed 2011·Granted Jan 19, 2016·3 cites·29 claims
- 3883US8094290B2Illumination optical apparatus, exposure apparatus, and device manufacturing methodOWA SOICHI·Filed 2008·Granted Jan 10, 2012·12 cites·20 claims
- 3982US7952780B2Microactuator, optical device and exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2009·Granted May 31, 2011·5 cites·13 claims
- 4080US8698998B2Exposure apparatus, method for cleaning member thereof, maintenance method for exposure apparatus, maintenance device, and method for producing deviceNAGASAKA HIROYUKI·Filed 2007·Granted Apr 15, 2014·4 cites·29 claims
- 4180US7277220B2Ultraviolet laser apparatus and exposure apparatus using sameNIKON CORP·Filed 2006·Granted Oct 2, 2007·4 cites·95 claims
- 4280US7126745B2Method of irradiating ultraviolet light onto an objectNIKON CORP·Filed 2005·Granted Oct 24, 2006·4 cites·44 claims
- 4379US10054858B2Spatial light modulator, method of driving same, and exposure method and apparatusWATANABE YOJI·Filed 2011·Granted Aug 21, 2018·2 cites·16 claims
- 4479US8208119B2Exposure apparatus, exposure method, and method for producing deviceKOBAYASHI NAOYUKI·Filed 2005·Granted Jun 26, 2012·3 cites·40 claims
- 4576US8807978B2Template manufacturing method, template inspecting method and inspecting apparatus, nanoimprint apparatus, nanoimprint system, and device manufacturing methodOWA SOICHI·Filed 2010·Granted Aug 19, 2014·3 cites·13 claims
- 4676US8169591B2Exposure apparatus, exposure method, and method for producing deviceOWA SOICHI·Filed 2005·Granted May 1, 2012·4 cites·38 claims
- 4776US6339634B1Soft x-ray light source deviceNIKON CORP·Filed 1999·Granted Jan 15, 2002·47 cites·31 claims
- 4874US6324203B1Laser light source, illuminating optical device, and exposure deviceNIKON CORP·Filed 1998·Granted Nov 27, 2001·37 cites·22 claims
- 4973US8405816B2Pattern formation method, pattern formation apparatus, exposure method, exposure apparatus, and device manufacturing methodHIRUKAWA SHIGERU·Filed 2008·Granted Mar 26, 2013·4 cites·45 claims
- 5073US5847812AProjection exposure system and methodNIKON CORP·Filed 1997·Granted Dec 8, 1998·33 cites·29 claims
Showing the top 50 of 104 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →