Inventor · disambiguated record
Songlin Xu
Also filed as: XU SONGLIN
13 granted patents·12 pending applications·1,216 citations·filing 1996–2022
92Inventor score
Files withAPPLIED MATERIALS INC7XU SONGLIN6ADVANCED MICRO FABRICATION EQUIPMENT INC SHANGHAI3MATTSON TECH INC2CHINA INT MARINE CONTAINERS1
Top patents by PatentIndex Score
25 records- 0198US6635578B1Method of operating a dual chamber reactor with neutral density decoupled from ion densityAPPLIED MATERIALS INC·Filed 2000·Granted Oct 21, 2003·615 cites·51 claims
- 0296US6352049B1Plasma assisted processing chamber with separate control of species densityAPPLIED MATERIALS INC·Filed 1998·Granted Mar 5, 2002·498 cites·24 claims
- 0388US7067432B2Methodology for in-situ and real-time chamber condition monitoring and process recovery during plasma processingAPPLIED MATERIALS INC·Filed 2003·Granted Jun 27, 2006·29 cites·14 claims
- 0472US7799685B2System and method for removal of photoresist in transistor fabrication for integrated circuit manufacturingMATTSON TECH INC·Filed 2004·Granted Sep 21, 2010·16 cites·23 claims
- 0570US6544896B1Method for enhancing etching of TiSixAPPLIED MATERIALS INC·Filed 2000·Granted Apr 8, 2003·16 cites·16 claims
- 0665US6008139AMethod of etching polycide structuresAPPLIED MATERIALS INC·Filed 1996·Granted Dec 28, 1999·31 cites·16 claims
- 0762US8093157B2Advanced processing technique and system for preserving tungsten in a device structureDIAO LI·Filed 2007·Granted Jan 10, 2012·3 cites·14 claims
- 0859US7561258B2Wafer tilt detection apparatus and methodMATTSON TECH INC·Filed 2007·Granted Jul 14, 2009·2 cites·22 claims
- 0955US9431216B2ICP source design for plasma uniformity and efficiency enhancementADVANCED MICRO-FABRICATION EQUIPMENT INC SHANGHAI·Filed 2013·Granted Aug 30, 2016·0 cites·8 claims
- 1050US12125258B2Distributed retrieval method, apparatus, and system, computer device, and storage mediumTENCENT TECH SHENZHEN CO LTD·Filed 2022·Granted Oct 22, 2024·0 cites·15 claims
- 1150US2009206056A1Method and Apparatus for Plasma Process Performance Matching in Multiple Wafer ChambersXU SONGLIN·Filed 2009·Application pending·0 cites
- 1249US7850139B2Transportation frame for oversize container and method of installing the frame onto the containerCHINA INT MARINE CONTAINERS·Filed 2007·Granted Dec 14, 2010·0 cites·13 claims
- 1348US2016131176A1Anti-loosening cylindrical threaded partXU SONGLIN·Filed 2014·Application pending·0 cites
- 1448US2016115990A1Anti-loosening cylindrical threaded partXU SONGLIN·Filed 2014·Application pending·0 cites
- 1548US2016153486A1Anti-loosening threaded partXU SONGLIN·Filed 2014·Application pending·0 cites
- 1648US2016322205A1Icp source design for plasma uniformity and efficiency enhancementADVANCED MICRO-FABRICATION EQUIPMENT INC SHANGHAI·Filed 2016·Application pending·0 cites
- 1745US2014083453A1Method for in situ cleaning of mocvd reaction chamberADVANCED MICRO FABRICATION EQUIPMENT INC SHANGHAI·Filed 2013·Application pending·0 cites
- 1843US2014083613A1Gas supply device for a vacuum processing chamber, method of gas supplying and switchingXU SONGLIN·Filed 2013·Application pending·0 cites
- 1940US2008124937A1Selective etching method and apparatusXU SONGLIN·Filed 2006·Application pending·0 cites
- 2036US2007269975A1System and method for removal of photoresist and stop layer following contact dielectric etchSAVAS STEPHEN E·Filed 2006·Application pending·0 cites
- 2135US6808647B1Methodologies to reduce process sensitivity to the chamber conditionAPPLIED MATERIALS INC·Filed 1999·Granted Oct 26, 2004·6 cites·7 claims
- 2235US2004157466A1Methods of forming polymer films and of using such polymer films to form structures on substratesFiled 2003·Application pending·0 cites
- 2335US2004157457A1Methods of using polymer films to form micro-structuresFiled 2003·Application pending·0 cites
- 2430US2004152331A1Process for etching polysilicon gates with good mask selectivity, critical dimension control, and cleanlinessAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
- 2529US9095038B2ICP source design for plasma uniformity and efficiency enhancementGANG SHI·Filed 2011·Granted Jul 28, 2015·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →