Inventor · disambiguated record
Steven H. Kim
Also filed as: KIM STEVEN · KIM STEVEN H
10 granted patents·4 pending applications·523 citations·filing 2004–2015
89Inventor score
Files withAPPLIED MATERIALS INC7CHEORWON PLASMA RES INST2WU DIEN-YEH2CHEORWON PLASMA RES INSTITUTE1KAWAGUCHI MARK NAOSHI1
Top patents by PatentIndex Score
14 records- 0198US7780789B2Vortex chamber lids for atomic layer depositionAPPLIED MATERIALS INC·Filed 2007·Granted Aug 24, 2010·458 cites·24 claims
- 0289US7846845B2Integrated method for removal of halogen residues from etched substrates in a processing systemAPPLIED MATERIALS INC·Filed 2007·Granted Dec 7, 2010·16 cites·27 claims
- 0383US9735002B2Integrated apparatus for efficient removal of halogen residues from etched substratesKAWAGUCHI MARK NAOSHI·Filed 2008·Granted Aug 15, 2017·12 cites·16 claims
- 0483US8491967B2In-situ chamber treatment and deposition processMA PAUL F·Filed 2008·Granted Jul 23, 2013·12 cites·2 claims
- 0582US7651587B2Two-piece dome with separate RF coils for inductively coupled plasma reactorsAPPLIED MATERIALS INC·Filed 2005·Granted Jan 26, 2010·8 cites·15 claims
- 0675US7183227B1Use of enhanced turbomolecular pump for gapfill deposition using high flows of low-mass fluent gasAPPLIED MATERIALS INC·Filed 2004·Granted Feb 27, 2007·15 cites·28 claims
- 0767US7811411B2Thermal management of inductively coupled plasma reactorsAPPLIED MATERIALS INC·Filed 2005·Granted Oct 12, 2010·2 cites·15 claims
- 0849US2008102208A1Vortex chamber lids for atomic layer depositionWU DIEN-YEH·Filed 2007·Application pending·0 cites
- 0949US2006225648A1Use of enhanced turbomolecular pump for gapfill deposition using high flows of low-mass fluent gasAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 1045US9714171B2Graphene-nano particle composite having nano particles crystallized therein at a high densityCHEORWON PLASMA RES INST·Filed 2013·Granted Jul 25, 2017·0 cites·9 claims
- 1144US2006075967A1Magnetic-field concentration in inductively coupled plasma reactorsAPPLIED MATERIALS INC·Filed 2004·Application pending·0 cites
- 1240US2008102203A1Vortex chamber lids for atomic layer depositionWU DIEN-YEH·Filed 2007·Application pending·0 cites
- 1339US10005716B2Method for synthesizing catecholamines by using plasma polymerizationCHEORWON PLASMA RES INSTITUTE·Filed 2015·Granted Jun 26, 2018·0 cites·8 claims
- 1436US9711256B2Graphene-nano particle composite having nanoparticles crystallized therein at a high densityCHEORWON PLASMA RES INST·Filed 2013·Granted Jul 18, 2017·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →