Inventor · disambiguated record
Stefan Lanio
Also filed as: LANIO STEFAN
41 granted patents·8 pending applications·464 citations·filing 1986–2019
98Inventor score
Files withINTEGRATED CIRCUIT TESTING11LANIO STEFAN8ADVANTEST CORP7ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH5APPLIED MATERIALS ISRAEL LTD4
Top patents by PatentIndex Score
49 records- 0195US9666406B1Charged particle beam device, system for a charged particle beam device, and method for operating a charged particle beam deviceICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2016·Granted May 30, 2017·19 cites·15 claims
- 0295US7335894B2High current density particle beam systemINTEGRATED CIRCUIT TESTING·Filed 2005·Granted Feb 26, 2008·40 cites·27 claims
- 0394US9666405B1System for imaging a signal charged particle beam, method for imaging a signal charged particle beam, and charged particle beam deviceICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2016·Granted May 30, 2017·13 cites·16 claims
- 0492US4740704AOmega-type electron energy filterZEISS STIFTUNG·Filed 1986·Granted Apr 26, 1988·49 cites·9 claims
- 0590US7439500B2Analyzing system and charged particle beam deviceINTEGRATED CIRCUIT TESTING·Filed 2006·Granted Oct 21, 2008·12 cites·27 claims
- 0688US8723117B2Switchable multi perspective detector, optics therefor and method of operating thereofLANIO STEFAN·Filed 2012·Granted May 13, 2014·9 cites·17 claims
- 0786US9697983B1Thermal field emitter tip, electron beam device including a thermal field emitter tip and method for operating an electron beam deviceICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2016·Granted Jul 4, 2017·7 cites·20 claims
- 0886US9472373B1Beam separator device, charged particle beam device and methods of operating thereofICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2015·Granted Oct 18, 2016·7 cites·20 claims
- 0986US6407387B1Particle beam apparatusADVANTEST CORP·Filed 1999·Granted Jun 18, 2002·46 cites·13 claims
- 1082US11094501B2Secondary charged particle imaging systemICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2019·Granted Aug 17, 2021·3 cites·25 claims
- 1182US10699867B2Simplified particle emitter and method of operating thereofICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2018·Granted Jun 30, 2020·2 cites·19 claims
- 1282US6667478B2Particle beam apparatusADVANTEST CORP·Filed 2002·Granted Dec 23, 2003·17 cites·24 claims
- 1381US5422486AScanning electron beam deviceINTEGRATED CIRCUIT TESTING·Filed 1993·Granted Jun 6, 1995·47 cites·7 claims
- 1478US6627890B2Particle beam apparatus for tilted observation of a specimenADVANTEST CORP·Filed 2000·Granted Sep 30, 2003·13 cites·14 claims
- 1578US4760261AAlpha-type electron energy filterZEISS STIFTUNG·Filed 1986·Granted Jul 26, 1988·23 cites·8 claims
- 1675US8963083B2Switchable multi perspective detector, optics therefore and method of operating thereofFIRNKES MATTHIAS·Filed 2013·Granted Feb 24, 2015·4 cites·20 claims
- 1775US6107633AElectron beam lensADVANTEST CORP·Filed 1998·Granted Aug 22, 2000·27 cites·16 claims
- 1874US8373136B2Achromatic beam deflector, achromatic beam separator, charged particle device, method of operating an achromatic beam deflector, and method of operating an achromatic beam separatorINTEGRATED CIRCUIT TESTING·Filed 2009·Granted Feb 12, 2013·3 cites·22 claims
- 1973US10168614B1On-axis illumination and alignment for charge control during charged particle beam inspectionAPPLIED MATERIALS ISRAEL LTD·Filed 2017·Granted Jan 1, 2019·1 cites·18 claims
- 2072US7507956B2Charged particle beam energy width reduction system for charged particle beam systemINTEGRATED CIRCUIT TESTING·Filed 2004·Granted Mar 24, 2009·9 cites·49 claims
- 2172US6104034AObjective lensADVANTEST CORP·Filed 1998·Granted Aug 15, 2000·24 cites·13 claims
- 2268US9805908B2Signal charged particle deflection device, signal charged particle detection system, charged particle beam device and method of detection of a signal charged particle beamICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2016·Granted Oct 31, 2017·1 cites·20 claims
- 2367US9048068B2Electron beam device with dispersion compensation, and method of operating sameLANIO STEFAN·Filed 2010·Granted Jun 2, 2015·2 cites·16 claims
- 2467US8158954B2Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lensLANIO STEFAN·Filed 2009·Granted Apr 17, 2012·1 cites·20 claims
- 2567US5895919AGun lens for generating a particle beamADVANTEST CORP·Filed 1997·Granted Apr 20, 1999·19 cites·15 claims
- 2665US6232601B1Dynamically compensated objective lens-detection device and methodADVANTEST CORP·Filed 1999·Granted May 15, 2001·18 cites·10 claims
- 2764US8481958B2Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lensLANIO STEFAN·Filed 2010·Granted Jul 9, 2013·1 cites·19 claims
- 2863US7763866B2Charged particle beam device with apertureINTEGRATED CIRCUIT TESTING·Filed 2004·Granted Jul 27, 2010·5 cites·21 claims
- 2963US7576917B2Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lensINTEGRATED CIRCUIT TESTING·Filed 2003·Granted Aug 18, 2009·7 cites·19 claims
- 3060US8963084B2Contamination reduction electrode for particle detectorINTEGRATED CIRCUIT TESTING·Filed 2014·Granted Feb 24, 2015·0 cites·17 claims
- 3160US7468517B2Single stage charged particle beam energy width reduction system for charged particle beam systemINTEGRATED CIRCUIT TESTING·Filed 2004·Granted Dec 23, 2008·4 cites·27 claims
- 3259US6051838AOptical unitACT ADVANCED CIRCUIT TESTING·Filed 1997·Granted Apr 18, 2000·14 cites·23 claims
- 3358US5847399ADeflection systemACT ADVANCED CIRCUIT TESTING·Filed 1997·Granted Dec 8, 1998·13 cites·16 claims
- 3457US7679054B2Double stage charged particle beam energy width reduction system for charged particle beam systemINTEGRATED CIRCUIT TESTING·Filed 2004·Granted Mar 16, 2010·3 cites·33 claims
- 3555US8816270B2Octopole device and method for spot size improvementKRAMER ALEKSANDRA·Filed 2012·Granted Aug 26, 2014·1 cites·15 claims
- 3653US10522327B2Method of operating a charged particle beam specimen inspection systemAPPLIED MATERIALS ISRAEL LTD·Filed 2018·Granted Dec 31, 2019·0 cites·7 claims
- 3753US2014175277A1Secondary electron optics and detection deviceLANIO STEFAN·Filed 2013·Application pending·0 cites
- 3853US2013320228A1Contamination reduction electrode for particle detectorLANIO STEFAN·Filed 2012·Application pending·0 cites
- 3951US10103004B2System and method for imaging a secondary charged particle beam with adaptive secondary charged particle opticsICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2015·Granted Oct 16, 2018·0 cites·4 claims
- 4051US10056228B2Charged particle beam specimen inspection system and method for operation thereofAPPLIED MATERIALS ISRAEL LTD·Filed 2014·Granted Aug 21, 2018·0 cites·14 claims
- 4151US8563927B2Shielding member having a charge control electrode, and a charged particle beam apparatusWINKLER DIETER·Filed 2011·Granted Oct 22, 2013·0 cites·20 claims
- 4250US2015228452A1Secondary electron optics and detection deviceINTEGRATED CIRCUIT TESTING·Filed 2015·Application pending·0 cites
- 4349US10991544B2Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimenICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2019·Granted Apr 27, 2021·0 cites·21 claims
- 4449US2012091359A1Simplified particle emitter and method of operating thereofLANIO STEFAN·Filed 2010·Application pending·0 cites
- 4549US2008135786A1Adjustable aperture element for particle beam device, method of operating and manufacturing thereofLANIO STEFAN·Filed 2007·Application pending·0 cites
- 4648US9953805B2System for imaging a secondary charged particle beam with adaptive secondary charged particle opticsICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MHH·Filed 2016·Granted Apr 24, 2018·0 cites·20 claims
- 4746US2006226753A1Stabilized emitter and method for stabilizing sameADAMEC PAVEL·Filed 2006·Application pending·0 cites
- 4837US2002067482A1Particle beam systemFiled 2001·Application pending·0 cites
- 4932US2016189916A1Scanning charged particle beam device having an aberration correction aperture and method of operating thereofAPPLIED MATERIALS ISRAEL LTD·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →