Inventor · disambiguated record
Stoyan Nihtianov
Also filed as: NIHTIANOV STOYAN
20 granted patents·4 pending applications·224 citations·filing 2003–2023
95Inventor score
Top patents by PatentIndex Score
24 records- 0196US7804575B2Lithographic apparatus and device manufacturing method having liquid evaporation controlASML NETHERLANDS BV·Filed 2005·Granted Sep 28, 2010·23 cites·44 claims
- 0295US7304715B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Dec 4, 2007·52 cites·39 claims
- 0394US11378893B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2020·Granted Jul 5, 2022·2 cites·20 claims
- 0494US7586108B2Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detectorASML NETHERLANDS BV·Filed 2007·Granted Sep 8, 2009·56 cites·19 claims
- 0591US8138485B2Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detectorNIHTIANOV STOYAN·Filed 2008·Granted Mar 20, 2012·35 cites·29 claims
- 0689US9331117B2Sensor and lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted May 3, 2016·6 cites·7 claims
- 0789US9188880B2Lithographic apparatus and device manufacturing method involving a heaterCADEE THEODORUS PETRUS MARIA·Filed 2011·Granted Nov 17, 2015·4 cites·32 claims
- 0888US9268242B2Lithographic apparatus and device manufacturing method involving a heater and a temperature sensorCADEE THEODORUS PETRUS MARIA·Filed 2010·Granted Feb 23, 2016·4 cites·38 claims
- 0986US10838310B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2019·Granted Nov 17, 2020·1 cites·20 claims
- 1082US10678147B2Measurement systems, lithographic apparatus, device manufacturing method and a method of measuringASML NETHERLANDS BV·Filed 2016·Granted Jun 9, 2020·2 cites·16 claims
- 1181US8426831B2Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detectorNIHTIANOV STOYAN·Filed 2012·Granted Apr 23, 2013·6 cites·26 claims
- 1281US7170583B2Lithographic apparatus immersion damage controlASML NETHERLANDS BV·Filed 2005·Granted Jan 30, 2007·8 cites·25 claims
- 1378US12342635B2Semiconductor detector and method of fabricating sameASML NETHERLANDS BV·Filed 2023·Granted Jun 24, 2025·0 cites·11 claims
- 1476US7190437B2Wireless signaling in a lithographic apparatusASML NETHERLANDS BV·Filed 2003·Granted Mar 13, 2007·12 cites·19 claims
- 1569US11843069B2Semiconductor detector and method of fabricating sameASML NETHERLANDS BV·Filed 2019·Granted Dec 12, 2023·0 cites·15 claims
- 1666US10508896B2Measurement substrate and a measurement methodASML NETHERLANDS BV·Filed 2016·Granted Dec 17, 2019·1 cites·21 claims
- 1763US10254663B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2015·Granted Apr 9, 2019·0 cites·38 claims
- 1862US7830495B2Lithographic apparatus and position sensorASML NETHERLANDS BV·Filed 2007·Granted Nov 9, 2010·4 cites·9 claims
- 1956US7148494B2Level sensor, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Dec 12, 2006·7 cites·17 claims
- 2055US2023207256A1Readout circuit for pixelized electron detectorASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 2154US7321416B2Lithographic apparatus, device manufacturing method, device manufactured thereby, and controllable patterning device utilizing a spatial light modulator with distributed digital to analog conversionASML NETHERLANDS BV·Filed 2005·Granted Jan 22, 2008·1 cites·25 claims
- 2252US2010165310A1EUV Mask InspectionASML HOLDING NV·Filed 2009·Application pending·0 cites
- 2352US2024096589A1Semiconductor charged particle detector for microscopyASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 2450US2023238211A1A detector substrate for use in a charged particle multi-beam assessment toolASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →