Inventor · disambiguated record
Stefan Piehler
Also filed as: PIEHLER STEFAN
4 granted patents·4 pending applications·0 citations·filing 2016–2025
52Inventor score
Top patents by PatentIndex Score
8 records- 0151US2025093197A1Vibration-monitored laser optical unitTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2024·Application pending·0 cites
- 0251US2025113427A1Euv radiation generation following laser beam rotationTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2024·Application pending·0 cites
- 0349US2025203746A1Beam diaphragm, euv light source, and method for operating an euv light sourceTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2025·Application pending·0 cites
- 0441US11968767B2EUV light source with a separation deviceTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2023·Granted Apr 23, 2024·0 cites·13 claims
- 0537US10574024B2Optical module, laser amplifier system, method and useUNIV STUTTGART·Filed 2017·Granted Feb 25, 2020·0 cites·15 claims
- 0636US12007693B2Laser focussing moduleASML NETHERLANDS BV·Filed 2020·Granted Jun 11, 2024·0 cites·18 claims
- 0736US10488250B2Method and device for quantitatively sensing the power fraction of a radiation background of a pulsed laserUNIV STUTTGART·Filed 2016·Granted Nov 26, 2019·0 cites·20 claims
- 0836US2020106233A1Method and apparatus for producing a radiation field amplifying systemUNIV STUTTGART·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →