Inventor · disambiguated record
Steven C. Selbrede
Also filed as: SELBREDE STEVEN C
6 granted patents·3 pending applications·816 citations·filing 1990–2009
89Inventor score
Top patents by PatentIndex Score
9 records- 0197US6143129AInductive plasma reactorMATTSON TECH INC·Filed 1998·Granted Nov 7, 2000·374 cites·35 claims
- 0296US6551447B1Inductive plasma reactorMATTSON TECH INC·Filed 2000·Granted Apr 22, 2003·113 cites·31 claims
- 0392US6835278B2Systems and methods for remote plasma cleanMATTSON TECH INC·Filed 2001·Granted Dec 28, 2004·62 cites·16 claims
- 0491US5383971ADifferential pressure CVD chuckGENUS INC·Filed 1992·Granted Jan 24, 1995·98 cites·12 claims
- 0589US5094885ADifferential pressure cvd chuckGENUS INC·Filed 1990·Granted Mar 10, 1992·81 cites·15 claims
- 0682US5447570APurge gas in wafer coating area selectionGENUS INC·Filed 1992·Granted Sep 5, 1995·88 cites·33 claims
- 0763US2010190331A1System for Depositing a Film Onto a Substrate Using a Low Vapor Pressure Gas PrecursorSELBREDE STEVEN C·Filed 2009·Application pending·0 cites
- 0844US2004025787A1System for depositing a film onto a substrate using a low pressure gas precursorFiled 2003·Application pending·0 cites
- 0943US2004247787A1Effluent pressure control for use in a processing systemFiled 2004·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Steven C. Selbrede files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →