Inventor · disambiguated record
Stefan Wittekoek
Also filed as: WITTEKOEK STEFAN
6 granted patents·430 citations·filing 1980–1993
88Inventor score
Top patents by PatentIndex Score
6 records- 0193US5100237AApparatus for projecting a mask pattern on a substrateASM LITHOGRAPHY·Filed 1990·Granted Mar 31, 1992·110 cites·34 claims
- 0292US5144363AApparatus for and method of projecting a mask pattern on a substrateASM LITHOGRAPHY BV·Filed 1991·Granted Sep 1, 1992·112 cites·71 claims
- 0390US5481362AApparatus for projecting a mask pattern on a substrateASM LITHOGRAPHY·Filed 1993·Granted Jan 2, 1996·84 cites·28 claims
- 0488US4356392AOptical imaging system provided with an opto-electronic detection system for determining a deviation between the image plane of the imaging system and a second plane on which an image is to be formedPHILIPS CORP·Filed 1980·Granted Oct 26, 1982·63 cites·5 claims
- 0581US4334139AApparatus for writing patterns in a layer on a substrate by means of a beam of electrically charged particlesPHILIPS CORP·Filed 1980·Granted Jun 8, 1982·25 cites·7 claims
- 0668US4655594ADisplacement device, particularly for the photolithographic treatment of a substratePHILIPS CORP·Filed 1986·Granted Apr 7, 1987·36 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →