Inventor · disambiguated record
Sukesh Janubhai Patel
Also filed as: PATEL SUKESH · PATEL SUKESH J · PATEL SUKESH JANUBHAI
18 granted patents·6 pending applications·243 citations·filing 1998–2017
94Inventor score
Files withTOKYO ELECTRON LTD10KAUSHAL SANJEEV8AHSOON TECHNOLOGIES INC1BLUE CONTROL TECHNOLOGIES INC1CONCEPTTAPISTRY LLC1
Top patents by PatentIndex Score
24 records- 0197US8396582B2Method and apparatus for self-learning and self-improving a semiconductor manufacturing toolKAUSHAL SANJEEV·Filed 2010·Granted Mar 12, 2013·61 cites·21 claims
- 0292US8744607B2Method and apparatus for self-learning and self-improving a semiconductor manufacturing toolTOKYO ELECTRON LTD·Filed 2013·Granted Jun 3, 2014·12 cites·20 claims
- 0386US9396443B2System and method for learning and/or optimizing manufacturing processesTOKYO ELECTRON LTD·Filed 2013·Granted Jul 19, 2016·6 cites·20 claims
- 0486US8954184B2Tool performance by linking spectroscopic information with tool operational parameters and material measurement informationKAUSHAL SANJEEV·Filed 2011·Granted Feb 10, 2015·8 cites·19 claims
- 0586US8725667B2Method and system for detection of tool performance degradation and mismatchKAUSHAL SANJEEV·Filed 2009·Granted May 13, 2014·30 cites·50 claims
- 0686US8078552B2Autonomous adaptive system and method for improving semiconductor manufacturing qualityKAUSHAL SANJEEV·Filed 2008·Granted Dec 13, 2011·16 cites·30 claims
- 0784US9424528B2Method and apparatus for self-learning and self-improving a semiconductor manufacturing toolTOKYO ELECTRON LTD·Filed 2014·Granted Aug 23, 2016·11 cites·20 claims
- 0882US8723869B2Biologically based chamber matchingKAUSHAL SANJEEV·Filed 2011·Granted May 13, 2014·8 cites·32 claims
- 0981US9275335B2Autonomous biologically based learning toolKAUSHAL SANJEEV·Filed 2012·Granted Mar 1, 2016·11 cites·20 claims
- 1081US8190543B2Autonomous biologically based learning toolKAUSHAL SANJEEV·Filed 2008·Granted May 29, 2012·17 cites·13 claims
- 1179US6834212B1Method and apparatus for APC solver engine and heuristicBLUE CONTROL TECHNOLOGIES INC·Filed 2002·Granted Dec 21, 2004·31 cites·24 claims
- 1276US10133265B2Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trendsTOKYO ELECTRON LTD·Filed 2016·Granted Nov 20, 2018·2 cites·20 claims
- 1375US9746849B2Method and apparatus for autonomous tool parameter impact identification system for semiconductor manufacturingTOKYO ELECTRON LTD·Filed 2012·Granted Aug 29, 2017·3 cites·19 claims
- 1472US7035696B1Method and apparatus for poly gate CD controlAHSOON TECHNOLOGIES INC·Filed 2002·Granted Apr 25, 2006·24 cites·33 claims
- 1569US9405289B2Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trendsTOKYO ELECTRON LTD·Filed 2012·Granted Aug 2, 2016·2 cites·20 claims
- 1667US10228678B2Tool failure analysis using space-distorted similarityTOKYO ELECTRON LTD·Filed 2015·Granted Mar 12, 2019·1 cites·22 claims
- 1760US10635993B2System and method for learning and/or optimizing manufacturing processesTOKYO ELECTRON LTD·Filed 2016·Granted Apr 28, 2020·0 cites·20 claims
- 1859US10571900B2Method and apparatus for autonomous tool parameter impact identification system for semiconductor manufacturingTOKYO ELECTRON LTD·Filed 2017·Granted Feb 25, 2020·0 cites·20 claims
- 1949US2014304196A1Biologically based chamber matchingTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 2047US2008297667A1Projection apparatus with direct attachment of external storage mediaCONCEPTTAPISTRY LLC·Filed 2007·Application pending·0 cites
- 2147US2015332167A1System and method for modeling and/or analyzing manufacturing processesKAUSHAL SANJEEV·Filed 2014·Application pending·0 cites
- 2243US2008190446A1Control of dry clean process in wafer processingRANADE RAJIV M·Filed 2007·Application pending·0 cites
- 2337US2005010319A1System and method for validating and visualizing APC assisted semiconductor manufacturing processesFiled 2003·Application pending·0 cites
- 2428US2001017622A1Apparatus and method for generating a configurable program explanation using templates and transparent graphical user interfacesFiled 1998·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →