Inventor · disambiguated record
Taku Hitomi
Also filed as: HITOMI TAKU
2 granted patents·0 citations·filing 2007–2014
23Inventor score
Technology areasH10P
Top patents by PatentIndex Score
2 records- 0132US7638443B2Method of forming ultra-thin SiN film by plasma CVDASM JAPAN·Filed 2007·Granted Dec 29, 2009·0 cites·13 claims
- 0229US10010987B2Method of mounting substrate support in chamber, method of dismounting substrate support and auxiliary transport toolASM IP HOLDING BV·Filed 2014·Granted Jul 3, 2018·0 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →