Inventor · disambiguated record
Takayuki Kamaishi
Also filed as: KAMAISHI TAKAYUKI
5 granted patents·4 pending applications·27 citations·filing 2005–2020
75Inventor score
Top patents by PatentIndex Score
9 records- 0183US8191505B2Process gas introducing mechanism and plasma processing deviceKAMAISHI TAKAYUKI·Filed 2009·Granted Jun 5, 2012·17 cites·22 claims
- 0277US7250094B2Heat treatment apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Jul 31, 2007·6 cites·13 claims
- 0375US10950417B2Substrate processing apparatus and substrate loading mechanismTOKYO ELECTRON LTD·Filed 2018·Granted Mar 16, 2021·2 cites·9 claims
- 0469US9984892B2Oxide film removing method, oxide film removing apparatus, contact forming method, and contact forming systemTOKYO ELECTRON LTD·Filed 2017·Granted May 29, 2018·1 cites·14 claims
- 0561US7769279B2Heat treatment apparatusTOKYO ELECTRON LTD·Filed 2007·Granted Aug 3, 2010·1 cites·14 claims
- 0646US2022148980A1Film forming apparatus, film forming method, and film forming systemTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 0743US2006060141A1Process gas introducing mechanism and plasma processing deviceTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 0833US2010037959A1Method for supplying process gas, system for supplying process gas, and system for processing object to be processedKAMAISHI TAKAYUKI·Filed 2007·Application pending·0 cites
- 0929US2012145697A1Heat treatment apparatusKOMATSU TOMOHITO·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →