Inventor · disambiguated record
Takaaki Nezu
Also filed as: NEZU TAKAAKI
5 granted patents·1 pending application·29 citations·filing 2002–2021
73Inventor score
Top patents by PatentIndex Score
6 records- 0176US7767055B2Capacitive coupling plasma processing apparatusTOKYO ELECTRON LTD·Filed 2005·Granted Aug 3, 2010·5 cites·17 claims
- 0273US7678225B2Focus ring for semiconductor treatment and plasma treatment deviceTOKYO ELECTRON LTD·Filed 2002·Granted Mar 16, 2010·21 cites·10 claims
- 0353US10978275B2Manufacturing method of showerhead for plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Apr 13, 2021·0 cites·5 claims
- 0441USD911985SGas introduction plate for plasma etching apparatus for etching semiconductor waferTOKYO ELECTRON LTD·Filed 2018·Granted Mar 2, 2021·3 cites·1 claims
- 0541US2021384017A1Trap apparatus and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0631US9048191B2Plasma etching methodUDA SHUICHIRO·Filed 2012·Granted Jun 2, 2015·0 cites·5 claims
Join the waitlist — get patent alerts
Get an alert when Takaaki Nezu files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →