Inventor · disambiguated record
Taku Ninomiya
Also filed as: NINOMIYA TAKU
24 granted patents·4 pending applications·613 citations·filing 1992–2018
97Inventor score
Top patents by PatentIndex Score
28 records- 0198US6583413B1Method of inspecting a circuit pattern and inspecting instrumentHITACHI LTD·Filed 2000·Granted Jun 24, 2003·123 cites·14 claims
- 0296US6465781B1Method and apparatus for inspecting or measuring a sample based on charged-particle beam imaging, and a charged-particle beam apparatusHITACHI LTD·Filed 2000·Granted Oct 15, 2002·85 cites·25 claims
- 0395US6310341B1Projecting type charged particle microscope and projecting type substrate inspection systemHITACHI LTD·Filed 1999·Granted Oct 30, 2001·108 cites·27 claims
- 0494US6580075B2Charged particle beam scanning type automatic inspecting apparatusHITACHI LTD·Filed 2002·Granted Jun 17, 2003·55 cites·4 claims
- 0592US7425704B2Inspection method and apparatus using an electron beamHITACHI HIGH TECH CORP·Filed 2006·Granted Sep 16, 2008·14 cites·7 claims
- 0691US7034298B2Inspection method and apparatus using an electron beamHITACHI HIGH TECH CORP·Filed 2003·Granted Apr 25, 2006·31 cites·14 claims
- 0790US7397031B2Method of inspecting a circuit pattern and inspecting instrumentHITACHI LTD·Filed 2006·Granted Jul 8, 2008·10 cites·7 claims
- 0888US9858659B2Pattern inspecting and measuring device and programHITACHI HIGH TECH CORP·Filed 2013·Granted Jan 2, 2018·9 cites·16 claims
- 0987US7098455B2Method of inspecting a circuit pattern and inspecting instrumentHITACHI LTD·Filed 2003·Granted Aug 29, 2006·26 cites·5 claims
- 1087US6335532B1Convergent charged particle beam apparatus and inspection method using sameHITACHI LTD·Filed 1999·Granted Jan 1, 2002·38 cites·3 claims
- 1184US9188554B2Pattern inspection device and pattern inspection methodHITACHI HIGH TECH CORP·Filed 2013·Granted Nov 17, 2015·6 cites·18 claims
- 1284US6559459B2Convergent charged particle beam apparatus and inspection method using sameHITACHI LTD·Filed 2001·Granted May 6, 2003·14 cites·11 claims
- 1380US7271385B2Inspection method and inspection apparatus using electron beamHITACHI HIGH TECH CORP·Filed 2005·Granted Sep 18, 2007·5 cites·5 claims
- 1480US6538248B1Charged particle beam scanning type automatic inspecting apparatusHITACHI LTD·Filed 1999·Granted Mar 25, 2003·30 cites·10 claims
- 1579US7071468B2Circuit pattern inspection method and its apparatusHITACHI HIGH TECH CORP·Filed 2004·Granted Jul 4, 2006·16 cites·6 claims
- 1679US6744057B2Convergent charged particle beam apparatus and inspection method using sameHITACHI LTD·Filed 2003·Granted Jun 1, 2004·11 cites·8 claims
- 1776US8953868B2Defect inspection method and defect inspection apparatusHITACHI HIGH TECH CORP·Filed 2013·Granted Feb 10, 2015·4 cites·18 claims
- 1876US6885012B2Convergent charged particle beam apparatus and inspection method using sameHITACHI LTD·Filed 2004·Granted Apr 26, 2005·9 cites·5 claims
- 1973US10692693B2System and method for measuring patternsHITACHI HIGH TECH CORP·Filed 2018·Granted Jun 23, 2020·1 cites·15 claims
- 2071US8907278B2Charged particle beam applied apparatus, and irradiation methodENYAMA MOMOYO·Filed 2011·Granted Dec 9, 2014·3 cites·12 claims
- 2170US8552373B2Charged particle beam device and sample observation methodENYAMA MOMOYO·Filed 2010·Granted Oct 8, 2013·2 cites·20 claims
- 2268US7855363B2Inspection method and apparatus using an electron beamHITACHI HIGH TECH CORP·Filed 2008·Granted Dec 21, 2010·1 cites·11 claims
- 2353US6486472B2Inspecting system using electron beam and inspecting method using sameHITACHI LTD·Filed 2001·Granted Nov 26, 2002·2 cites·10 claims
- 2453US2009206257A1Pattern inspection method and inspection apparatusHITACHI HIGH TECH CORP·Filed 2009·Application pending·0 cites
- 2550US5392115AMethod of detecting inclination of a specimen and a projection exposure device as well as method of detecting period of periodically varying signalHITACHI LTD·Filed 1992·Granted Feb 21, 1995·10 cites·9 claims
- 2648US2011133066A1Pattern inspection device and methodNOZOE MARI·Filed 2009·Application pending·0 cites
- 2742US2005040331A1Inspection method and inspection apparatus using electron beamFiled 2004·Application pending·0 cites
- 2838US2013271595A1Circuit pattern inspecting device and inspecting method thereofHIROI TAKASHI·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →