Inventor · disambiguated record
Takafumi Tsuchiya
Also filed as: TSUCHIYA TAKAFUMI
9 granted patents·1 pending application·55 citations·filing 2008–2025
83Inventor score
Technology areasH10P
Top patents by PatentIndex Score
10 records- 0195US12322631B2Substrate processing system, substrate processing method, and recording mediumTOKYO ELECTRON LTD·Filed 2023·Granted Jun 3, 2025·4 cites·10 claims
- 0295US8851819B2Substrate processing apparatusKAMIKAWA YUJI·Filed 2010·Granted Oct 7, 2014·29 cites·3 claims
- 0387US8079797B2Substrate processing system and substrate transfer methodTANAKA OSAMU·Filed 2008·Granted Dec 20, 2011·19 cites·16 claims
- 0477US11869780B2Substrate liquid processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Jan 9, 2024·2 cites·4 claims
- 0573US2025266277A1Substrate processing system, substrate processing method, and recording mediumTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0666US9305818B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Apr 5, 2016·1 cites·3 claims
- 0736US11594430B2Substrate liquid processing apparatus, substrate liquid processing method and recording mediumTOKYO ELECTRON LTD·Filed 2018·Granted Feb 28, 2023·0 cites·17 claims
- 0836US8790469B2Treating apparatus, treating method and recording mediumTSUCHIYA TAKAFUMI·Filed 2009·Granted Jul 29, 2014·0 cites·9 claims
- 0929US10928732B2Substrate liquid processing apparatus, substrate liquid processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2016·Granted Feb 23, 2021·0 cites·13 claims
- 1029US10458010B2Substrate liquid processing apparatus, substrate liquid processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2016·Granted Oct 29, 2019·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →