Inventor · disambiguated record
Tatsushi Ueda
Also filed as: UEDA TATSUSHI
15 granted patents·12 pending applications·20 citations·filing 2001–2024
88Inventor score
Technology areasH10P
Top patents by PatentIndex Score
27 records- 0187US9236242B2Substrate processing method and substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2012·Granted Jan 12, 2016·6 cites·13 claims
- 0282US10192735B2Substrate processing method and substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2017·Granted Jan 29, 2019·2 cites·15 claims
- 0379US8334215B2Substrate processing method and substrate processing apparatusUEDA TATSUSHI·Filed 2009·Granted Dec 18, 2012·5 cites·15 claims
- 0478US11664275B2Method of manufacturing semiconductor device, substrate processing apparatus, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2020·Granted May 30, 2023·1 cites·9 claims
- 0577US12154826B2Method of manufacturing semiconductor device, substrate processing apparatus, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2023·Granted Nov 26, 2024·0 cites·18 claims
- 0676US2025022753A1Method of manufacturing semiconductor device, substrate processing apparatus, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2024·Application pending·0 cites
- 0771US9754780B2Substrate processing method and substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2015·Granted Sep 5, 2017·1 cites·13 claims
- 0869US10546761B2Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2017·Granted Jan 28, 2020·1 cites·13 claims
- 0968US9786493B2Method of manufacturing semiconductor device, substrate processing apparatus, and recording mediumHITACHI INT ELECTRIC INC·Filed 2014·Granted Oct 10, 2017·2 cites·6 claims
- 1068US8066894B2Substrate processing method and substrate processing apparatusUEDA TATSUSHI·Filed 2006·Granted Nov 29, 2011·2 cites·11 claims
- 1156US2024194476A1Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2024·Application pending·0 cites
- 1255US12040161B2Method of manufacturing semiconductor device, substrate processing apparatus, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2021·Granted Jul 16, 2024·0 cites·13 claims
- 1354US11908682B2Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording mediumKOKUSAI ELECTRIC CORP·Filed 2021·Granted Feb 20, 2024·0 cites·20 claims
- 1451US2023201889A1Cleaning method, recording medium, and substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2022·Application pending·0 cites
- 1550US2023097621A1Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2022·Application pending·0 cites
- 1650US2022301850A1Substrate Processing Apparatus, Non-transitory Computer-readable Recording Medium, Substrate Processing Method and Method of Manufacturing Semiconductor DeviceKOKUSAI ELECTRIC CORP·Filed 2022·Application pending·0 cites
- 1749US2007062646A1Method and apparatus for processing substratesHITACHI INT ELECTRIC INC·Filed 2006·Application pending·0 cites
- 1848US2022301863A1Method of manufacturing semiconductor device, method of processing substrate, recording medium, and substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2022·Application pending·0 cites
- 1947US11081362B2Method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2019·Granted Aug 3, 2021·0 cites·17 claims
- 2046US2022139675A1Method of Manufacturing Semiconductor Device, Substrate Processing Method, Non-transitory Computer-readable Recording Medium and Substrate Processing ApparatusKOKUSAI ELECTRIC CORP·Filed 2022·Application pending·0 cites
- 2146US2021305045A1Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording MediumKOKUSAI ELECTRIC CORP·Filed 2021·Application pending·0 cites
- 2245US7651954B2Manufacturing method of semiconductor device and semiconductor device manufacturing apparatusHITACHI INT ELECTRIC INC·Filed 2007·Granted Jan 26, 2010·0 cites·7 claims
- 2343US2016153085A1Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2015·Application pending·0 cites
- 2442US2014087567A1Substrate processing apparatus and method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2013·Application pending·0 cites
- 2540US9257271B2Semiconductor device manufacturing method, substrate processing apparatus, and non-transitory recording mediumHITACHI INT ELECTRIC INC·Filed 2013·Granted Feb 9, 2016·0 cites·6 claims
- 2638US2002036066A1Method and apparatus for processing substratesHITACHI INT ELECTRIC INC·Filed 2001·Application pending·0 cites
- 2732US9748132B2Substrate processing apparatus, method for manufacturing semiconductor device, method for processing substratesHARADA KOICHIRO·Filed 2012·Granted Aug 29, 2017·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →