Inventor · disambiguated record
Tammo Uitterdijk
Also filed as: UITTERDIJK TAMMO
33 granted patents·10 pending applications·128 citations·filing 2003–2025
96Inventor score
Files withASML NETHERLANDS BV25ASML HOLDING NV12VAN DE KERKHOF MARCUS ADRIANUS2LIEBREGTS PAULUS MARTINUS MARIA1SCHWAB MARKUS1
Top patents by PatentIndex Score
43 records- 0194US7375799B2Lithographic apparatusASML NETHERLANDS BV·Filed 2005·Granted May 20, 2008·24 cites·15 claims
- 0290US10324383B2Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatusASML HOLDING NV·Filed 2016·Granted Jun 18, 2019·5 cites·24 claims
- 0389US9482967B2Lithographic apparatus, control system and device manufacturing methodVAN DE KERKHOF MARCUS ADRIANUS·Filed 2011·Granted Nov 1, 2016·6 cites·21 claims
- 0488US10001713B2Lithographic apparatus and methodASML HOLDING NV·Filed 2014·Granted Jun 19, 2018·7 cites·15 claims
- 0587US7405805B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jul 29, 2008·25 cites·24 claims
- 0684US7580113B2Method of reducing a wave front aberration, and computer program productASML NETHERLANDS BV·Filed 2006·Granted Aug 25, 2009·12 cites·21 claims
- 0778US2025341789A1Sub micron particle detection on burl tops by applying a variable voltage to an oxidized waferASML HOLDING NV·Filed 2025·Application pending·0 cites
- 0877US7372633B2Lithographic apparatus, aberration correction device and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted May 13, 2008·4 cites·19 claims
- 0976US12111581B2Method to manufacture nano ridges in hard ceramic coatingsASML HOLDING NV·Filed 2019·Granted Oct 8, 2024·2 cites·18 claims
- 1076US10310391B2Electrostatic clamp and a method for manufacturing the sameASML HOLDING NV·Filed 2015·Granted Jun 4, 2019·3 cites·7 claims
- 1176US7843552B2Lithographic apparatus, device manufacturing method, and mask having a pellicle attached heretoASML NETHERLANDS BV·Filed 2005·Granted Nov 30, 2010·5 cites·16 claims
- 1275US7924403B2Lithographic apparatus and device and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Apr 12, 2011·3 cites·25 claims
- 1372US7535644B2Lens element, lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2005·Granted May 19, 2009·3 cites·20 claims
- 1471US8013978B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Sep 6, 2011·2 cites·16 claims
- 1569US12393126B2Sub micron particle detection on burl tops by applying a variable voltage to an oxidized waferASML HOLDING NV·Filed 2021·Granted Aug 19, 2025·0 cites·18 claims
- 1669US7379154B2Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicleASML NETHERLANDS BV·Filed 2004·Granted May 27, 2008·9 cites·18 claims
- 1767US11270906B2Burls with altered surface topography for holding an object in lithography applicationsASML HOLDING NV·Filed 2018·Granted Mar 8, 2022·1 cites·19 claims
- 1867US2019086819A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Application pending·0 cites
- 1966US7508489B2Method of manufacturing a miniaturized deviceZEISS CARL SMT AG·Filed 2005·Granted Mar 24, 2009·2 cites·20 claims
- 2065US9606448B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Mar 28, 2017·2 cites·39 claims
- 2165US7239370B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Jul 3, 2007·8 cites·20 claims
- 2263US7538952B2Lithographic apparatus, aberration correction device and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted May 26, 2009·1 cites·20 claims
- 2357US9170498B2Lithographic apparatus and a method for determining a polarization property of a projection system using an adjustable polarizer and interferometric sensorASML NETHERLANDS BV·Filed 2013·Granted Oct 27, 2015·0 cites·12 claims
- 2456US12235592B2Object holder, electrostatic sheet and method for making an electrostatic sheetASML NETHERLANDS BV·Filed 2021·Granted Feb 25, 2025·0 cites·14 claims
- 2556US10908518B2Lithographic apparatus and methodASML HOLDING NV·Filed 2018·Granted Feb 2, 2021·0 cites·19 claims
- 2655US10146142B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Dec 4, 2018·0 cites·20 claims
- 2751US8542342B2Method of manufacturing a miniaturized deviceSCHWAB MARKUS·Filed 2009·Granted Sep 24, 2013·0 cites·22 claims
- 2850US11988971B2Lithographic apparatus, substrate table, and methodASML HOLDING NV·Filed 2020·Granted May 21, 2024·0 cites·20 claims
- 2950USRE49066EChucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatusASML HOLDING NV·Filed 2016·Granted May 10, 2022·0 cites·50 claims
- 3050US8045134B2Lithographic apparatus, control system and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Oct 25, 2011·0 cites·24 claims
- 3150US7136152B2Method for bonding a pellicle to a patterning device and patterning device comprising a pellicleASML HOLDING NV·Filed 2004·Granted Nov 14, 2006·2 cites·16 claims
- 3250US2006203221A1Lithographic apparatus and a method for determining a polarization propertyASML NETHERLANDS BV·Filed 2006·Application pending·0 cites
- 3350US2008137049A1Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicleASML NETHERLANDS BV·Filed 2008·Application pending·0 cites
- 3450US2025138441A1Systems and methods for cleaning a portion of a lithography apparatusASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 3549US9442388B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Sep 13, 2016·0 cites·20 claims
- 3648US8913225B2Lithographic apparatus and device manufacturing methodUITTERDIJK TAMMO·Filed 2011·Granted Dec 16, 2014·0 cites·20 claims
- 3748US7538875B2Lithographic apparatus and methods for use thereofASML NETHERLANDS BV·Filed 2004·Granted May 26, 2009·2 cites·12 claims
- 3846US2023031443A1Wafer clamp hard burl production and refurbishmentASML HOLDING NV·Filed 2020·Application pending·0 cites
- 3945US8675173B2Lithographic apparatus and device manufacturing methodLIEBREGTS PAULUS MARTINUS MARIA·Filed 2011·Granted Mar 18, 2014·0 cites·20 claims
- 4040US2024176254A1Clamp electrode modification for improved overlayASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 4139US2010118288A1Lithographic projection system and projection lens polarization sensorVAN DE KERKHOF MARCUS ADRIANUS·Filed 2006·Application pending·0 cites
- 4239US2010182582A1Passive reticle tool, a lithographic apparatus and a method of patterning a device in a lithography toolASML NETHERLANDS BV·Filed 2006·Application pending·0 cites
- 4339US2010045956A1Lithographic Apparatus, Method for Determining at Least One Polarization Property Thereof, Polarization Analyzer and Polarization Sensor ThereofASML NETHERLANDS BV·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →