Inventor · disambiguated record
Taro Yamamoto
Also filed as: YAMAMOTO TARO
89 granted patents·13 pending applications·369 citations·filing 2000–2024
99Inventor score
Files withTOKYO ELECTRON LTD55YAMAMOTO TARO11FUJI PHOTO FILM CO LTD6KONICA MINOLTA INC5TAKIGUCHI YASUSHI4
Top patents by PatentIndex Score
102 records- 0196US11664254B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Granted May 30, 2023·4 cites·12 claims
- 0295US7712475B2Cleaning apparatus, coating and developing apparatus, and cleaning methodTOKYO ELECTRON LTD·Filed 2006·Granted May 11, 2010·27 cites·18 claims
- 0394US7697110B2Exposure apparatus and device manufacturing methodNIKON CORP·Filed 2005·Granted Apr 13, 2010·19 cites·9 claims
- 0493US9256131B2Developing method for developing apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Feb 9, 2016·7 cites·6 claims
- 0592US8337104B2Developing apparatus, developing method and storage mediumTAKIGUCHI YASUSHI·Filed 2011·Granted Dec 25, 2012·10 cites·11 claims
- 0690US8578953B2Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage mediumTAKIGUCHI YASUSHI·Filed 2007·Granted Nov 12, 2013·17 cites·21 claims
- 0790US8154106B2Coating and developing system and coating and developing methodISHIDA SEIKI·Filed 2006·Granted Apr 10, 2012·17 cites·6 claims
- 0890US7563042B2Substrate carrying apparatus, substrate carrying method, and coating and developing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Jul 21, 2009·16 cites·13 claims
- 0987US10128136B2Liquid processing apparatus and liquid processing methodTOKYO ELECTRON LTD·Filed 2017·Granted Nov 13, 2018·5 cites·19 claims
- 1087US8026048B2Developing apparatus and developing methodTOKYO ELECTRON LTD·Filed 2010·Granted Sep 27, 2011·7 cites·13 claims
- 1185US7809460B2Coating and developing apparatus, coating and developing method and storage medium in which a computer-readable program is storedTOKYO ELECTRON LTD·Filed 2006·Granted Oct 5, 2010·11 cites·15 claims
- 1285US6811962B2Method for developing processing and apparatus for supplying developing solutionTOKYO ELECTRON LTD·Filed 2002·Granted Nov 2, 2004·29 cites·10 claims
- 1384US9716002B2Substrate cleaning methodTOKYO ELECTRON LTD·Filed 2016·Granted Jul 25, 2017·3 cites·15 claims
- 1482US8678684B2Developing methodTOKYO ELECTRON LTD·Filed 2013·Granted Mar 25, 2014·4 cites·14 claims
- 1582US7959988B2Coating film forming apparatus and methodTOKYO ELECTRON LTD·Filed 2007·Granted Jun 14, 2011·8 cites·12 claims
- 1682US6709174B2Apparatus and method for developmentTOKYO ELECTRON LTD·Filed 2002·Granted Mar 23, 2004·27 cites·14 claims
- 1781US9947556B2Substrate cleaning apparatus, substrate cleaning method, and storage mediumTOKYO ELECTRON LTD·Filed 2014·Granted Apr 17, 2018·5 cites·12 claims
- 1881US9214363B2Coating and developing apparatus, coating film forming method, and storage medium storing program for performing the methodTOKYO ELECTRON LTD·Filed 2013·Granted Dec 15, 2015·4 cites·5 claims
- 1981US8865396B2Developing method and developing apparatusTAKEGUCHI HIROFUMI·Filed 2009·Granted Oct 21, 2014·5 cites·13 claims
- 2080US2025079215A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 2179US12198961B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2023·Granted Jan 14, 2025·0 cites·9 claims
- 2279US9386173B2Printing system, printer, job processing method and computer readable recording medium storing job processing programKONICA MINOLTA INC·Filed 2014·Granted Jul 5, 2016·3 cites·32 claims
- 2379US9120120B2Cleaning apparatus and cleaning method, coater/developer and coating and developing method, and computer readable storing mediumTOKYO ELECTRON LTD·Filed 2014·Granted Sep 1, 2015·4 cites·6 claims
- 2478US8770111B2Transport vehicle and transport systemYAMAMOTO TARO·Filed 2011·Granted Jul 8, 2014·4 cites·7 claims
- 2578US8333522B2Developing apparatus, developing method and storage mediumARIMA HIROSHI·Filed 2011·Granted Dec 18, 2012·5 cites·15 claims
- 2678US8037890B2Substrate cleaning device and substrate cleaning methodTOKYO ELECTRON LTD·Filed 2006·Granted Oct 18, 2011·5 cites·6 claims
- 2778US7665916B2Coater/developer and coating/developing methodTOKYO ELECTRON LTD·Filed 2004·Granted Feb 23, 2010·21 cites·17 claims
- 2876US8186298B2Coating film forming apparatus, use of coating film forming apparatus, and recording mediumOGATA NOBUHIRO·Filed 2008·Granted May 29, 2012·4 cites·12 claims
- 2975US8851092B2Cleaning apparatus and cleaning method, coater/developer and coating and developing method, and computer readable storing mediumYAMAMOTO TARO·Filed 2009·Granted Oct 7, 2014·5 cites·10 claims
- 3075US7284917B2Coating and developing system and coating and developing methodTOKYO ELECTRON LTD·Filed 2006·Granted Oct 23, 2007·5 cites·21 claims
- 3174US7665918B2Developing apparatus, developing method and storage mediumTOKYO ELECTRON LTD·Filed 2008·Granted Feb 23, 2010·4 cites·19 claims
- 3273US10840079B2Substrate processing apparatus, substrate processing method and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Nov 17, 2020·2 cites·17 claims
- 3373US8387630B2Protective film removing device, mixed chemical solution recovering method and program storage mediumYAMAMOTO TARO·Filed 2007·Granted Mar 5, 2013·4 cites·12 claims
- 3473US8069816B2Coating film processing method and apparatusYAMAMOTO TARO·Filed 2007·Granted Dec 6, 2011·4 cites·11 claims
- 3573US7924402B2Exposure apparatus and device manufacturing methodNIKON CORP·Filed 2006·Granted Apr 12, 2011·3 cites·5 claims
- 3672US8980013B2Substrate cleaning method and substrate cleaning apparatusYOSHIHARA KOUSUKE·Filed 2012·Granted Mar 17, 2015·2 cites·7 claims
- 3772US8920922B2Polyurethane urea elastic fiberYAMAMOTO TARO·Filed 2007·Granted Dec 30, 2014·1 cites·7 claims
- 3872US8216389B2Substrate cleaning method and substrate cleaning apparatusYOSHIHARA KOUSUKE·Filed 2009·Granted Jul 10, 2012·3 cites·5 claims
- 3972US7530749B2Coater/developer and coating/developing methodTOKYO ELECTRON LTD·Filed 2004·Granted May 12, 2009·14 cites·6 claims
- 4071US11869789B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Jan 9, 2024·0 cites·17 claims
- 4171US8393808B2Developing methodYAMAMOTO TARO·Filed 2010·Granted Mar 12, 2013·2 cites·20 claims
- 4271US7806076B2Developing apparatus and methodTOKYO ELECTRON LTD·Filed 2005·Granted Oct 5, 2010·3 cites·7 claims
- 4370US9052610B2Coating and developing system and coating and developing methodISHIDA SEIKI·Filed 2012·Granted Jun 9, 2015·2 cites·8 claims
- 4469US7714979B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2008·Granted May 11, 2010·3 cites·9 claims
- 4568US9470979B2Developing treatment apparatus and developing treatment methodTOKYO ELECTRON LTD·Filed 2016·Granted Oct 18, 2016·1 cites·7 claims
- 4668US7485364B2Polyurethane elastic fiber and process for producing sameASAHI KASEI FIBERS CORP·Filed 2005·Granted Feb 3, 2009·1 cites·11 claims
- 4768US6372065B1Apparatus and method for producing photographic roll filmFUJI PHOTO FILM CO LTD·Filed 2000·Granted Apr 16, 2002·4 cites·46 claims
- 4867US7733472B2Method and system for determining condition of process performed for coating film before immersion light exposureTOKYO ELECTRON LTD·Filed 2007·Granted Jun 8, 2010·2 cites·9 claims
- 4966US9568829B2Developing method, developing apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2014·Granted Feb 14, 2017·1 cites·14 claims
- 5066US8632295B2Transporting system, and teaching method in the transporting systemONISHI HISASHI·Filed 2008·Granted Jan 21, 2014·5 cites·7 claims
Showing the top 50 of 102 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →