Inventor · disambiguated record
Tatsuya Yanagida
Also filed as: YANAGIDA TATSUYA
40 granted patents·14 pending applications·197 citations·filing 2006–2020
97Inventor score
Top patents by PatentIndex Score
54 records- 0196US8669543B2System and method for generating extreme ultraviolet light, and laser apparatusYANAGIDA TATSUYA·Filed 2011·Granted Mar 11, 2014·20 cites·27 claims
- 0295US10932350B2Extreme ultraviolet light generation systemGIGAPHOTON INC·Filed 2019·Granted Feb 23, 2021·4 cites·19 claims
- 0395US9072153B2Extreme ultraviolet light generation system utilizing a pre-pulse to create a diffused dome shaped targetWAKABAYASHI OSAMU·Filed 2012·Granted Jun 30, 2015·16 cites·20 claims
- 0494US10172225B2Extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2018·Granted Jan 1, 2019·5 cites·7 claims
- 0594US9986629B2Extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2016·Granted May 29, 2018·5 cites·8 claims
- 0694US9265136B2System and method for generating extreme ultraviolet lightHORI TSUKASA·Filed 2012·Granted Feb 16, 2016·13 cites·17 claims
- 0793US9509115B2System and method for generating extreme ultraviolet light, and laser apparatusGIGAPHOTON INC·Filed 2015·Granted Nov 29, 2016·5 cites·14 claims
- 0893US9130345B2System and method for generating extreme ultraviolet light, and laser apparatusGIGAPHOTON INC·Filed 2014·Granted Sep 8, 2015·10 cites·4 claims
- 0993US9113540B2System and method for generating extreme ultraviolet lightHORI TSUKASA·Filed 2012·Granted Aug 18, 2015·14 cites·33 claims
- 1093US8558202B2Extreme ultraviolet light source apparatusYANAGIDA TATSUYA·Filed 2011·Granted Oct 15, 2013·14 cites·24 claims
- 1190US9167678B2System and method for generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2014·Granted Oct 20, 2015·8 cites·16 claims
- 1289US10074956B2System and method for generating extreme ultraviolet light, and laser apparatusGIGAPHOTON INC·Filed 2016·Granted Sep 11, 2018·3 cites·8 claims
- 1389US8067756B2Extreme ultraviolet light source apparatusUENO YOSHIFUMI·Filed 2009·Granted Nov 29, 2011·24 cites·12 claims
- 1488US8710475B2Extreme ultraviolet light source device and method for generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2013·Granted Apr 29, 2014·7 cites·9 claims
- 1587US10630042B2System and method for generating extreme ultraviolet light, and laser apparatusGIGAPHOTON INC·Filed 2018·Granted Apr 21, 2020·2 cites·18 claims
- 1685US9402297B2Extreme ultraviolet light generation systemGIGAPHOTON INC·Filed 2015·Granted Jul 26, 2016·3 cites·18 claims
- 1784US8669909B2Antenna, antenna apparatus, and communication apparatusPANASONIC CORP·Filed 2012·Granted Mar 11, 2014·7 cites·15 claims
- 1883US11477877B2Laser apparatus for generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2019·Granted Oct 18, 2022·2 cites·20 claims
- 1983US8530870B2Extreme ultraviolet light source apparatusKAKIZAKI KOUJI·Filed 2011·Granted Sep 10, 2013·5 cites·26 claims
- 2082US10306743B1System and method for generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2018·Granted May 28, 2019·1 cites·14 claims
- 2182US8436328B2Extreme ultraviolet light source apparatusYANAGIDA TATSUYA·Filed 2009·Granted May 7, 2013·14 cites·16 claims
- 2281US8742380B2Target supply device, extreme ultraviolet light generation apparatus, and method for supplying targetGIGAPHOTON INC·Filed 2012·Granted Jun 3, 2014·5 cites·12 claims
- 2374US9072152B2Extreme ultraviolet light generation system utilizing a variation value formula for the intensityWAKABAYASHI OSAMU·Filed 2012·Granted Jun 30, 2015·4 cites·10 claims
- 2471US10667375B2Extreme ultraviolet light generation methodGIGAPHOTON INC·Filed 2019·Granted May 26, 2020·1 cites·18 claims
- 2569US8841641B2Extreme ultraviolet light source apparatusGIGAPHOTON INC·Filed 2013·Granted Sep 23, 2014·2 cites·16 claims
- 2667US8513630B2Extreme ultraviolet light source apparatusUENO YOSHIFUMI·Filed 2011·Granted Aug 20, 2013·2 cites·6 claims
- 2766US10251255B2System and method for generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2018·Granted Apr 2, 2019·0 cites·18 claims
- 2864US10555408B2Extreme ultraviolet light generation systemGIGAPHOTON INC·Filed 2018·Granted Feb 4, 2020·0 cites·9 claims
- 2964US10117317B2System and method for generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2017·Granted Oct 30, 2018·0 cites·20 claims
- 3061US9980360B2Extreme ultraviolet light generation systemGIGAPHOTON INC·Filed 2016·Granted May 22, 2018·0 cites·19 claims
- 3160US9877378B2System and method for generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2016·Granted Jan 23, 2018·0 cites·15 claims
- 3260US9497841B2Extreme ultraviolet light generation systemGIGAPHOTON INC·Filed 2015·Granted Nov 15, 2016·0 cites·20 claims
- 3358US9497842B2System and method for generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2016·Granted Nov 15, 2016·0 cites·20 claims
- 3457US10512148B2System and method for generating extreme ultraviolet light employing laser pulse including pedestalGIGAPHOTON INC·Filed 2017·Granted Dec 17, 2019·0 cites·20 claims
- 3553US2015351209A1System and method for generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2015·Application pending·0 cites
- 3652US9172141B2Antenna, antenna apparatus, and communication apparatusPANASONIC CORP·Filed 2014·Granted Oct 27, 2015·0 cites·18 claims
- 3751US10582601B2Extreme ultraviolet light generating apparatus using differing laser beam diametersGIGAPHOTON INC·Filed 2018·Granted Mar 3, 2020·0 cites·20 claims
- 3851US2014203194A1System and method for generating extreme ultra violet lightNAGANO HITOSHI·Filed 2012·Application pending·0 cites
- 3949US2015123019A1System and method for generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2015·Application pending·0 cites
- 4047US11226565B2Extreme ultraviolet light generating system and electronic device manufacturing methodGIGAPHOTON INC·Filed 2020·Granted Jan 18, 2022·0 cites·19 claims
- 4147US2015102239A1Extreme ultraviolet light generation systemGIGAPHOTON INC·Filed 2014·Application pending·0 cites
- 4247US2009028012A1Removable medium recording/reproducing device recording/reproducing operation inhibiting method, recording operation inhibiting method, firmware update method, and file containing the firmwareMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2006·Application pending·0 cites
- 4346US8471226B2Extreme ultraviolet light source device and method for producing extreme ultraviolet lightKOMORI HIROSHI·Filed 2009·Granted Jun 25, 2013·1 cites·17 claims
- 4445US2014077099A1System and method for generating extreme ultraviolet lightHORI TSUKASA·Filed 2012·Application pending·0 cites
- 4545US2019150260A1Droplet detector and euv light generation deviceGIGAPHOTON INC·Filed 2019·Application pending·0 cites
- 4644US2015043599A1Laser system and extreme ultraviolet light generation systemGIGAPHOTON INC·Filed 2014·Application pending·0 cites
- 4743US2014346374A1Faraday rotator, optical isolator, laser apparatus, and extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2014·Application pending·0 cites
- 4842US2019239329A1Extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2019·Application pending·0 cites
- 4941US10627287B2Thomson scattering measurement system and EUV light generation systemGIGAPHOTON INC·Filed 2019·Granted Apr 21, 2020·0 cites·17 claims
- 5040US2013186567A1Target supply deviceGIGAPHOTON INC·Filed 2012·Application pending·0 cites
Showing the top 50 of 54 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →