Inventor · disambiguated record
Terry L. Lentz
Also filed as: LENTZ TERRY L
8 granted patents·193 citations·filing 1998–2001
90Inventor score
Technology areasH10P
Top patents by PatentIndex Score
8 records- 0181US5961169AApparatus for sensing the presence of a waferSTRASBAUGH·Filed 1998·Granted Oct 5, 1999·76 cites·10 claims
- 0278US6131589AAccurate positioning of a waferSTRASBAUGH INC·Filed 1999·Granted Oct 17, 2000·36 cites·10 claims
- 0375US6405740B1Accurate positioning of a waferLAM RES CORP·Filed 2000·Granted Jun 18, 2002·11 cites·7 claims
- 0471US6505635B1Lifting and rinsing a waferLAM RES CORP·Filed 2000·Granted Jan 14, 2003·9 cites·20 claims
- 0571US6102057ALifting and rinsing a waferSTRASBAUGH·Filed 1999·Granted Aug 15, 2000·25 cites·1 claims
- 0668US6267642B1Sensing the presence of a waferLAM RES CORP·Filed 1999·Granted Jul 31, 2001·21 cites·1 claims
- 0765US6796881B1Sensing the presence of a waferLAM RES CORP·Filed 2001·Granted Sep 28, 2004·6 cites·11 claims
- 0850US6283827B1Non-contacting support for a waferLAM RES CORP·Filed 1999·Granted Sep 4, 2001·9 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →