Inventor · disambiguated record
Teruomi Minami
Also filed as: MINAMI TERUOMI
20 granted patents·3 pending applications·278 citations·filing 1994–2023
93Inventor score
Top patents by PatentIndex Score
23 records- 0193US5671544ASubstrate drying apparatus and substrate drying methodTOKYO ELECTRON LTD·Filed 1996·Granted Sep 30, 1997·56 cites·15 claims
- 0293US5575079ASubstrate drying apparatus and substrate drying methodTOKYO ELECTRON LTD·Filed 1994·Granted Nov 19, 1996·48 cites·11 claims
- 0390US6029371ADrying treatment method and apparatusTOKYO ELECTRON LTD·Filed 1998·Granted Feb 29, 2000·107 cites·11 claims
- 0482US11869777B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Jan 9, 2024·1 cites·16 claims
- 0582US8475668B2Substrate liquid processing apparatus, substrate liquid processing method, and storage medium having substrate liquid processing program stored thereinTANAKA HIROSHI·Filed 2010·Granted Jul 2, 2013·6 cites·6 claims
- 0676US9362106B2Substrate processing method, substrate processing apparatus, and storage mediumSONY CORP·Filed 2013·Granted Jun 7, 2016·4 cites·8 claims
- 0774US10026629B2Substrate liquid processing apparatus, substrate liquid processing method, and computer-readable storage medium storing substrate liquid processing programTOKYO ELECTRON LTD·Filed 2015·Granted Jul 17, 2018·2 cites·5 claims
- 0874US6158141AApparatus and method for drying semiconductor substrateSONY CORP·Filed 1999·Granted Dec 12, 2000·46 cites·24 claims
- 0972US8371318B2Liquid processing apparatus, liquid processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2012·Granted Feb 12, 2013·2 cites·3 claims
- 1071US12362202B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2023·Granted Jul 15, 2025·0 cites·5 claims
- 1170US10515820B2Process and apparatus for processing a nitride structure without silica depositionTOKYO ELECTRON LTD·Filed 2017·Granted Dec 24, 2019·1 cites·20 claims
- 1261US8978671B2Substrate processing method and substrate processing apparatusTANAKA SATORU·Filed 2011·Granted Mar 17, 2015·1 cites·8 claims
- 1357US8303723B2Liquid processing apparatus, liquid processing method, and storage mediumMINAMI TERUOMI·Filed 2009·Granted Nov 6, 2012·1 cites·11 claims
- 1456US7669472B2Liquid level detector and liquid processing system provided with the sameTOKYO ELECTRON LTD·Filed 2006·Granted Mar 2, 2010·3 cites·11 claims
- 1555US10916440B2Process and apparatus for processing a nitride structure without silica depositionTOKYO ELECTRON LTD·Filed 2019·Granted Feb 9, 2021·0 cites·13 claims
- 1654US2009056764A1Liquid processing apparatus, liquid processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 1749US11201050B2Substrate processing method, recording medium and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Dec 14, 2021·0 cites·14 claims
- 1846US8308870B2Cleaning apparatus, cleaning method and recording mediumMINAMI TERUOMI·Filed 2009·Granted Nov 13, 2012·0 cites·10 claims
- 1946US2010108096A1Liquid processing method and apparatusTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 2042US9321085B2Substrate processing method, storage medium storing computer program for implementing substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2012·Granted Apr 26, 2016·0 cites·7 claims
- 2136US8906165B2Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatusMINAMI TERUOMI·Filed 2011·Granted Dec 9, 2014·0 cites·8 claims
- 2235US8545640B2Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatusMINAMI TERUOMI·Filed 2011·Granted Oct 1, 2013·0 cites·7 claims
- 2333US2017301534A1Substrate liquid processing method, substrate liquid processing apparatus, and computer-readable storage medium that stores substrate liquid processing programTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →