Inventor · disambiguated record
Tetsuji Sato
Also filed as: SATO TETSUJI
26 granted patents·6 pending applications·629 citations·filing 1988–2024
96Inventor score
Top patents by PatentIndex Score
32 records- 0196USD709536SFocusing ringYOSHIMURA AKIHIRO·Filed 2012·Granted Jul 22, 2014·455 cites·1 claims
- 0296US7438783B2Plasma processing apparatus and plasma processing methodSHINETSU CHEMICAL CO·Filed 2005·Granted Oct 21, 2008·40 cites·6 claims
- 0391US8083891B2Plasma processing apparatus and the upper electrode unitSATO TETSUJI·Filed 2010·Granted Dec 27, 2011·14 cites·13 claims
- 0485US11032899B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Jun 8, 2021·4 cites·9 claims
- 0578US7927066B2Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing componentTOKYO ELECTRON LTD·Filed 2006·Granted Apr 19, 2011·8 cites·12 claims
- 0675US8173036B2Plasma processing method and apparatusHONDA MASANOBU·Filed 2006·Granted May 8, 2012·5 cites·12 claims
- 0775US7837432B2Exhaust system and exhausting pump connected to a processing chamber of a substrate processing apparatusTOKYO ELECTRON LTD·Filed 2008·Granted Nov 23, 2010·5 cites·7 claims
- 0874US8524005B2Heat-transfer structure and substrate processing apparatusMIYAGAWA MASAAKI·Filed 2007·Granted Sep 3, 2013·4 cites·10 claims
- 0973US7513112B2Reservoir built-in type actuatorSUMITOMO PRECISION PROD CO·Filed 2007·Granted Apr 7, 2009·9 cites·4 claims
- 1071US9455125B2Substrate processing apparatusYOSHIMURA AKIHIRO·Filed 2011·Granted Sep 27, 2016·3 cites·10 claims
- 1170US5808571ASynchronization control unit which maintains synchronization between serial-to-parallel converters operating in parallel, or between parallel-to-serial converters operating in parallelFUJITSU LTD·Filed 1997·Granted Sep 15, 1998·35 cites·26 claims
- 1268US11825589B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Nov 21, 2023·0 cites·22 claims
- 1367US7815767B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2004·Granted Oct 19, 2010·8 cites·12 claims
- 1462US7382987B2Identification level control method and optical receiverFUJITSU LTD·Filed 2004·Granted Jun 3, 2008·10 cites·12 claims
- 1561US2024249907A1Upper electrode structure and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1660US8727708B2Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing componentMORIYA TSUYOSHI·Filed 2011·Granted May 20, 2014·1 cites·20 claims
- 1759US7707924B2Linear actuatorHONDA MOTOR CO LTD·Filed 2005·Granted May 4, 2010·8 cites·31 claims
- 1856US2009255631A1Plasma Processing Apparatus and the Upper Electrode UnitTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 1952US11257662B2Annular member, plasma processing apparatus and plasma etching methodTOKYO ELECTRON LTD·Filed 2019·Granted Feb 22, 2022·0 cites·8 claims
- 2052US2009206055A1Plasma processing apparatus and method, and baffle plate of the plasma processing apparatusTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 2149US12340985B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Jun 24, 2025·0 cites·12 claims
- 2248US11961718B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Apr 16, 2024·0 cites·18 claims
- 2346US2021183685A1Edge ring and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 2445US8077761B2Data transmission and reception module, and method of adjusting reception threshold value thereofSATO TETSUJI·Filed 2008·Granted Dec 13, 2011·0 cites·8 claims
- 2543US10847348B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Nov 24, 2020·0 cites·17 claims
- 2643US2004261712A1Plasma processing apparatusFiled 2004·Application pending·0 cites
- 2740US4914425AHighly sensitive smoke detectorHOCHIKI CO·Filed 1988·Granted Apr 3, 1990·10 cites·4 claims
- 2837US8687343B2Substrate mounting table of substrate processing apparatusSATO TETSUJI·Filed 2010·Granted Apr 1, 2014·0 cites·7 claims
- 2936US2011064417A1Communication systemFUJITSU OPTICAL COMPONENTS LTD·Filed 2010·Application pending·0 cites
- 3030USD495008SIndia ink containerPATENT ISLAND CO LTD·Filed 2003·Granted Aug 24, 2004·1 cites·1 claims
- 3130USD493489SIndia ink containerPATENT ISLAND CO LTD·Filed 2003·Granted Jul 27, 2004·1 cites·1 claims
- 3229US5767396AMethod and device for measuring fuel injection timingTOYOTA TECHNO SERVICE CORP·Filed 1997·Granted Jun 16, 1998·8 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →