Inventor · disambiguated record
Tetsuya Takagaki
Also filed as: TAKAGAKI TETSUYA
6 granted patents·2 pending applications·259 citations·filing 1979–2006
86Inventor score
Files withHITACHI LTD3HITACHI INT ELECTRIC INC2AGENCY IND SCIENCE TECHN1JAPAN AS REPRESENTED BY THE DI1JP THE AGENCY OF IND SCIENCE A1
Top patents by PatentIndex Score
8 records- 0191US5001327AApparatus and method for performing heat treatment on semiconductor wafersHITACHI LTD·Filed 1988·Granted Mar 19, 1991·146 cites·40 claims
- 0279US4282825ASurface treatment deviceHITACHI LTD·Filed 1979·Granted Aug 11, 1981·45 cites·27 claims
- 0360US4468195AThermal treatment apparatusHITACHI LTD·Filed 1982·Granted Aug 28, 1984·24 cites·13 claims
- 0456US6514425B1Dry etching gasAGENCY IND SCIENCE TECHN·Filed 1997·Granted Feb 4, 2003·23 cites·2 claims
- 0549US2007062646A1Method and apparatus for processing substratesHITACHI INT ELECTRIC INC·Filed 2006·Application pending·0 cites
- 0644US6383403B1Dry etching methodJAPAN AS REPRESENTED BY THE DI·Filed 1997·Granted May 7, 2002·12 cites·13 claims
- 0740US6322715B1Gas composition for dry etching and process of dry etchingJP THE AGENCY OF IND SCIENCE A·Filed 1997·Granted Nov 27, 2001·9 cites·10 claims
- 0838US2002036066A1Method and apparatus for processing substratesHITACHI INT ELECTRIC INC·Filed 2001·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Tetsuya Takagaki files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →