Inventor · disambiguated record
Thomas Hamelin
Also filed as: HAMELIN THOMAS
15 granted patents·3 pending applications·1,092 citations·filing 2003–2012
94Inventor score
Top patents by PatentIndex Score
18 records- 0198US7651583B2Processing system and method for treating a substrateTOKYO ELECTRON LTD·Filed 2004·Granted Jan 26, 2010·558 cites·21 claims
- 0297US6951821B2Processing system and method for chemically treating a substrateTOKYO ELECTRON LTD·Filed 2003·Granted Oct 4, 2005·306 cites·36 claims
- 0392US7462564B2Processing system and method for treating a substrateTOKYO ELECTRON LTD·Filed 2006·Granted Dec 9, 2008·18 cites·41 claims
- 0491US7079760B2Processing system and method for thermally treating a substrateTOKYO ELECTRON LTD·Filed 2003·Granted Jul 18, 2006·61 cites·28 claims
- 0591US7029536B2Processing system and method for treating a substrateTOKYO ELECTRON LTD·Filed 2003·Granted Apr 18, 2006·49 cites·23 claims
- 0690US7964058B2Processing system and method for chemically treating a substrateTOKYO ELECTRON LTD·Filed 2005·Granted Jun 21, 2011·13 cites·9 claims
- 0787US8303716B2High throughput processing system for chemical treatment and thermal treatment and method of operatingWALLACE JAY R·Filed 2008·Granted Nov 6, 2012·12 cites·20 claims
- 0881US8034176B2Gas distribution system for a post-etch treatment systemTOKYO ELECTRON LTD·Filed 2006·Granted Oct 11, 2011·9 cites·28 claims
- 0978US8409399B2Reduced maintenance chemical oxide removal (COR) processing systemLAFLAMME JR ARTHUR H·Filed 2009·Granted Apr 2, 2013·7 cites·21 claims
- 1078US7214274B2Method and apparatus for thermally insulating adjacent temperature controlled processing chambersTOKYO ELECTRON LTD·Filed 2003·Granted May 8, 2007·22 cites·12 claims
- 1177US8057633B2Post-etch treatment system for removing residue on a substrateTSUKAMOTO YUJI·Filed 2006·Granted Nov 15, 2011·7 cites·28 claims
- 1270US8007591B2Substrate holder having a fluid gap and method of fabricating the substrate holderTOKYO ELECTRON LTD·Filed 2004·Granted Aug 30, 2011·13 cites·36 claims
- 1369US9019078B2Surgical object tracking systemHAMELIN THOMAS·Filed 2009·Granted Apr 28, 2015·11 cites·6 claims
- 1469US8303715B2High throughput thermal treatment system and method of operatingHAMELIN THOMAS·Filed 2008·Granted Nov 6, 2012·5 cites·16 claims
- 1550US2013061878A1High throughput processing system for chemical treatment and thermal treatment and method of operatingTOKYO ELECTRON LTD·Filed 2012·Application pending·0 cites
- 1649US2011204029A1Processing system and method for chemically treating a substrateTOKYO ELECTRON LTD·Filed 2011·Application pending·0 cites
- 1746US6992892B2Method and apparatus for efficient temperature control using a contact volumeTOKYO ELECTRON LTD·Filed 2003·Granted Jan 31, 2006·1 cites·24 claims
- 1842US2004182315A1Reduced maintenance chemical oxide removal (COR) processing systemTOKYO ELECTRON LTD·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →