Inventor · disambiguated record
Thibault Simon Mathieu Laurent
Also filed as: LAURENT THIBAULT · LAURENT THIBAULT SIMON MATHIEU
43 granted patents·3 pending applications·62 citations·filing 2011–2025
97Inventor score
Files withASML NETHERLANDS BV36KUNNEN JOHAN GERTRUDIS CORNELIS3LAURENT THIBAULT SIMON MATHIEU2TEN KATE NICOLAAS2ORANO NUCLEAR PACKAGES AND SERVICES1
Top patents by PatentIndex Score
46 records- 0194US10324382B2Support table for a lithographic apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Jun 18, 2019·7 cites·20 claims
- 0294US9823589B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2016·Granted Nov 21, 2017·5 cites·20 claims
- 0391US9971252B2Support table for a lithographic apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted May 15, 2018·4 cites·20 claims
- 0490US8970822B2Support table for a lithographic apparatus, lithographic apparatus and device manufacturing methodKUNNEN JOHAN GERTRUDIS CORNELIS·Filed 2012·Granted Mar 3, 2015·8 cites·20 claims
- 0589US9785055B2Object holder and lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Oct 10, 2017·7 cites·20 claims
- 0689US9575419B2Support table for a lithographic apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Feb 21, 2017·4 cites·21 claims
- 0789US9298107B2Lithographic apparatus and methodLAURENT THIBAULT SIMON MATHIEU·Filed 2011·Granted Mar 29, 2016·6 cites·22 claims
- 0887US10747126B2Support table for a lithographic apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Aug 18, 2020·2 cites·20 claims
- 0986US12204255B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2023·Granted Jan 21, 2025·0 cites·20 claims
- 1086US9915877B2Object holder and lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Mar 13, 2018·3 cites·20 claims
- 1185US9740110B2Support table for a lithographic apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Aug 22, 2017·2 cites·20 claims
- 1284US2023280663A1Support table for a lithographic apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 1383US11281115B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2020·Granted Mar 22, 2022·1 cites·20 claims
- 1481US9632435B2Lithographic apparatus and methodTEN KATE NICOLAAS·Filed 2011·Granted Apr 25, 2017·2 cites·26 claims
- 1580US11630399B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2022·Granted Apr 18, 2023·0 cites·20 claims
- 1678US10520837B2Lithographic apparatus, support table for a lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Dec 31, 2019·1 cites·20 claims
- 1778US2025138440A1Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2025·Application pending·0 cites
- 1877US9513568B2Lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Dec 6, 2016·2 cites·20 claims
- 1975US11846879B2Method of unloading an object from a support tableASML NETHERLANDS BV·Filed 2022·Granted Dec 19, 2023·0 cites·20 claims
- 2075US11650511B2Support table for a lithographic apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2020·Granted May 16, 2023·0 cites·20 claims
- 2174US10495985B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Dec 3, 2019·1 cites·23 claims
- 2274US9280063B2Substrate table assembly, an immersion lithographic apparatus and a device manufacturing methodKUNNEN JOHAN GERTRUDIS CORNELIS·Filed 2012·Granted Mar 8, 2016·3 cites·20 claims
- 2373US10551752B2Lithographic apparatus and methodTEN KATE NICOLAAS·Filed 2011·Granted Feb 4, 2020·1 cites·33 claims
- 2471US11500296B2Method of unloading an object from a support tableASML NETHERLANDS BV·Filed 2021·Granted Nov 15, 2022·0 cites·20 claims
- 2568US11300890B2Lithographic apparatus, support table for a lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Apr 12, 2022·0 cites·20 claims
- 2668US9897928B2Lithographic apparatus, support table for a lithographic apparatus and device manufacturing methodKUNNEN JOHAN GERTRUDIS CORNELIS·Filed 2012·Granted Feb 20, 2018·1 cites·20 claims
- 2767US9753382B2Sensor, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Sep 5, 2017·1 cites·20 claims
- 2866US11385547B2Extraction body for lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted Jul 12, 2022·0 cites·20 claims
- 2966US10508896B2Measurement substrate and a measurement methodASML NETHERLANDS BV·Filed 2016·Granted Dec 17, 2019·1 cites·21 claims
- 3065US10591828B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2019·Granted Mar 17, 2020·0 cites·20 claims
- 3163US10203611B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2017·Granted Feb 12, 2019·0 cites·20 claims
- 3261USRE49297ELithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Nov 15, 2022·0 cites·23 claims
- 3360USRE48668ETemperature sensing probe, burl plate, lithographic apparatus and methodASML NETHERLANDS BV·Filed 2017·Granted Aug 3, 2021·0 cites·39 claims
- 3460US10481502B2Object holder and lithographic apparatusASML NETHERLANDS BV·Filed 2018·Granted Nov 19, 2019·0 cites·20 claims
- 3557US11175594B2Method of unloading an object from a support tableASML NETHERLANDS BV·Filed 2018·Granted Nov 16, 2021·0 cites·21 claims
- 3655US9971254B2Sensor, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted May 15, 2018·0 cites·20 claims
- 3754US10788763B2Lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Sep 29, 2020·0 cites·20 claims
- 3854US10705426B2Extraction body for lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Jul 7, 2020·0 cites·20 claims
- 3954US10191377B2Lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Jan 29, 2019·0 cites·21 claims
- 4053US9141005B2Temperature sensing probe, burl plate, lithographic apparatus and methodLAURENT THIBAULT SIMON MATHIEU·Filed 2012·Granted Sep 22, 2015·0 cites·20 claims
- 4151US9939738B2Lithographic apparatus and an object positioning systemASML NETHERLANDS BV·Filed 2015·Granted Apr 10, 2018·0 cites·20 claims
- 4250USRE49142ELithographic apparatus and an object positioning systemASML NETHERLANDS BV·Filed 2015·Granted Jul 19, 2022·0 cites·24 claims
- 4350US2025037893A1Improved system for supporting packaging for transporting radioactive materials, configured to allow it to pivot from a horizontal position for transport into a vertical position for useORANO NUCLEAR PACKAGES AND SERVICES·Filed 2022·Application pending·0 cites
- 4449US10114295B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Oct 30, 2018·0 cites·21 claims
- 4547US9618858B2Lithographic apparatus and a device manufacturing method involving thermal conditioning of a tablePATEL HRISHIKESH·Filed 2011·Granted Apr 11, 2017·0 cites·21 claims
- 4638US9904177B2Fluid handling structure, a lithographic apparatus and a device manufacturing methodTHOMAS IVO ADAM JOHANNES·Filed 2012·Granted Feb 27, 2018·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →