Inventor · disambiguated record
Thomas R. Omstead
Also filed as: OMSTEAD THOMAS · OMSTEAD THOMAS R · OMSTEAD THOMAS ROBERT
33 granted patents·6 pending applications·1,956 citations·filing 1994–2024
98Inventor score
Files withCVC PRODUCTS INC13VARIAN SEMICONDUCTOR EQUIPMENT ASS INC7MICRON TECHNOLOGY INC4CVC INC2GU TAO2
Top patents by PatentIndex Score
39 records- 0198US6692575B1Apparatus for supporting a substrate in a reaction chamberCVC PRODUCTS INC·Filed 2000·Granted Feb 17, 2004·565 cites·22 claims
- 0297US6713373B1Method for obtaining adhesion for device manufactureNOVELLUS SYSTEMS INC·Filed 2002·Granted Mar 30, 2004·168 cites·1 claims
- 0397US6365502B1Microelectronic interconnect material with adhesion promotion layer and fabrication methodCVC PRODUCTS INC·Filed 2000·Granted Apr 2, 2002·153 cites·17 claims
- 0496US6444263B1Method of chemical-vapor deposition of a materialCVC PRODUCTS INC·Filed 2000·Granted Sep 3, 2002·108 cites·20 claims
- 0595US6508197B1Apparatus for dispensing gas for fabricating substratesCVC PRODUCTS INC·Filed 2000·Granted Jan 21, 2003·70 cites·23 claims
- 0695US6190732B1Method and system for dispensing process gas for fabricating a device on a substrateCVC PRODUCTS INC·Filed 1998·Granted Feb 20, 2001·126 cites·24 claims
- 0794US7037574B2Atomic layer deposition for fabricating thin filmsVEECO INSTR INC·Filed 2001·Granted May 2, 2006·83 cites·30 claims
- 0894US6902620B1Atomic layer deposition systems and methodsNOVELLUS SYSTEMS INC·Filed 2001·Granted Jun 7, 2005·86 cites·29 claims
- 0992US6544341B1System for fabricating a device on a substrate with a process gasCVC PRODUCTS INC·Filed 2000·Granted Apr 8, 2003·41 cites·24 claims
- 1092US6274495B1Method for fabricating a device on a substrateCVC PRODUCTS INC·Filed 2000·Granted Aug 14, 2001·40 cites·23 claims
- 1191US6645847B2Microelectronic interconnect material with adhesion promotion layer and fabrication methodCVC PRODUCTS INC·Filed 2002·Granted Nov 11, 2003·47 cites·22 claims
- 1291US6627995B2Microelectronic interconnect material with adhesion promotion layer and fabrication methodCVC PRODUCTS INC·Filed 2002·Granted Sep 30, 2003·59 cites·25 claims
- 1390US10436717B2Compositional optical emission spectroscopy for detection of particle induced arcs in a fabrication processTOKYO ELECTRON LTD·Filed 2017·Granted Oct 8, 2019·7 cites·20 claims
- 1488US5775416ATemperature controlled chuck for vacuum processingCVC PRODUCTS INC·Filed 1995·Granted Jul 7, 1998·84 cites·12 claims
- 1586US10121966B2Semiconductor device structures including silicon-containing dielectric materialsMICRON TECHNOLOGY INC·Filed 2016·Granted Nov 6, 2018·3 cites·18 claims
- 1686US8211593B2Low platinum fuel cells, catalysts, and method for preparing the sameGU TAO·Filed 2005·Granted Jul 3, 2012·7 cites·27 claims
- 1784US9343317B2Methods of forming silicon-containing dielectric materials and semiconductor device structuresMICRON TECHNOLOGY INC·Filed 2013·Granted May 17, 2016·4 cites·25 claims
- 1883US5876573AHigh magnetic flux cathode apparatus and method for high productivity physical-vapor depositionCVC INC·Filed 1996·Granted Mar 2, 1999·61 cites·34 claims
- 1982US6221217B1Physical vapor deposition system having reduced thickness backing plateCVC INC·Filed 1998·Granted Apr 24, 2001·55 cites·20 claims
- 2080US6461675B2Method for forming a copper film on a substrateCVC PRODUCTS INC·Filed 1998·Granted Oct 8, 2002·65 cites·71 claims
- 2179US5746897AHigh magnetic flux permanent magnet array apparatus and method for high productivity physical vapor depositionCVC PRODUCTS INC·Filed 1996·Granted May 5, 1998·39 cites·23 claims
- 2278US10468595B2Semiconductor device structures including silicon-containing dielectric materialsMICRON TECHNOLOGY INC·Filed 2018·Granted Nov 5, 2019·1 cites·19 claims
- 2371US9453279B2Method for selectively depositing a layer on a three dimensional structureVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Sep 27, 2016·1 cites·8 claims
- 2471US7059070B2Footwear containing improved audio/visual displaysALINA DESIGNS INC·Filed 2003·Granted Jun 13, 2006·42 cites·12 claims
- 2567US10930846B2Methods of forming silicon-containing dielectric materials and methods of forming a semiconductor device comprising nitrogen radicals and oxygen-containing, silicon-containing, or carbon-containing precursorsMICRON TECHNOLOGY INC·Filed 2019·Granted Feb 23, 2021·0 cites·16 claims
- 2667US9929015B2High efficiency apparatus and method for depositing a layer on a three dimensional structureVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Mar 27, 2018·1 cites·15 claims
- 2766US5950723AMethod of regulating substrate temperature in a low pressure environmentCVC PRODUCTS INC·Filed 1997·Granted Sep 14, 1999·28 cites·7 claims
- 2865US9460961B2Techniques and apparatus for anisotropic metal etchingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Oct 4, 2016·1 cites·12 claims
- 2963US2025320606A1Low index porous silicon oxide and silicon nitride co-deposition methodOMSTEAD THOMAS ROBERT·Filed 2024·Application pending·0 cites
- 3062US11031247B2Method and apparatus for depositing a monolayer on a three dimensional structureVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Jun 8, 2021·0 cites·14 claims
- 3160US2016002784A1Method and apparatus for depositing a monolayer on a three dimensional structureVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Application pending·0 cites
- 3259US9847228B2Method for selectively depositing a layer on a three dimensional structureVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Dec 19, 2017·0 cites·14 claims
- 3357US2012238440A1Low Platinum Fuel Cells, Catalysts, and Method for Preparing the SameGU TAO·Filed 2012·Application pending·0 cites
- 3452US9435038B2Ion implant assisted metal etchingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Sep 6, 2016·0 cites·17 claims
- 3550US9396965B2Techniques and apparatus for anisotropic metal etchingVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted Jul 19, 2016·0 cites·13 claims
- 3650US2005279390A1Umbrella with hologramOMSTEAD THOMAS R·Filed 2004·Application pending·0 cites
- 3747US2016379844A1Techniques and apparatus for anisotropic metal etchingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Application pending·0 cites
- 3840US2005172785A1Musical instrumentFiled 2004·Application pending·0 cites
- 3937US5663098AMethod for deposition of a conductor in integrated circuitsSANDIA CORP·Filed 1994·Granted Sep 2, 1997·11 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →