Inventor · disambiguated record
Thomas Adriaan Ooms
Also filed as: OOMS THOMAS ADRIAAN
3 granted patents·2 pending applications·3 citations·filing 2012–2023
57Inventor score
Top patents by PatentIndex Score
5 records- 0178US9261800B2Alignment of an interferometer module for use in an exposure toolDE BOER GUIDO·Filed 2012·Granted Feb 16, 2016·2 cites·18 claims
- 0256US2025329511A1Electron-optical apparatus and method of obtaining topographical information about a sample surfaceASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0356US2017277043A1Lithography system with differential interferometer moduleMAPPER LITHOGRAPHY IP BV·Filed 2017·Application pending·0 cites
- 0455US9678443B2Lithography system with differential interferometer moduleDE BOER GUIDO·Filed 2012·Granted Jun 13, 2017·0 cites·42 claims
- 0555US9551563B2Multi-axis differential interferometerMAPPER LITHOGRAPHY IP BV·Filed 2013·Granted Jan 24, 2017·1 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →