Inventor · disambiguated record
Thomas M. Pratt
Also filed as: PRATT THOMAS · PRATT THOMAS M · PRATT THOMAS MARK
5 granted patents·4 pending applications·1,258 citations·filing 1998–2022
86Inventor score
Top patents by PatentIndex Score
9 records- 0197US7737035B1Dual seal deposition process chamber and processNOVELLUS SYSTEMS INC·Filed 2006·Granted Jun 15, 2010·472 cites·33 claims
- 0297US6143082AIsolation of incompatible processes in a multi-station processing chamberNOVELLUS SYSTEMS INC·Filed 1998·Granted Nov 7, 2000·672 cites·17 claims
- 0393US6319553B1Isolation of incompatible processes in a multi-station processing chamberNOVELLUS SYSTEMS INC·Filed 2000·Granted Nov 20, 2001·79 cites·13 claims
- 0479US6712907B1Magnetically coupled linear servo-drive mechanismNOVELLUS SYSTEMS INC·Filed 2001·Granted Mar 30, 2004·33 cites·21 claims
- 0549USD1069043SInlet adapter componentLAM RES CORP·Filed 2021·Granted Apr 1, 2025·2 cites·1 claims
- 0645US2025062106A1Remote plasma clean (rpc) delivery inlet adapterLAM RES CORP·Filed 2022·Application pending·0 cites
- 0745US2022298624A1Substantially carbon-free molybdenum-containing and tungsten-containing films in semiconductor device manufacturingLAM RES CORP·Filed 2020·Application pending·0 cites
- 0842US2008081114A1Apparatus and method for delivering uniform fluid flow in a chemical deposition systemNOVELLUS SYSTEMS INC·Filed 2006·Application pending·0 cites
- 0938US2008264443A1Apparatus and methods for increasing the rate of solute concentration evolution in a supercritical process chamberNOVELLUS SYSTEMS INC·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →