Inventor · disambiguated record
Thomas Theiler
Also filed as: THEILER THOMAS
3 granted patents·1 pending application·69 citations·filing 1997–2009
71Inventor score
Top patents by PatentIndex Score
4 records- 0172US5965047ARapid thermal processing (RTP) system with rotating substrateSTEAG AST·Filed 1997·Granted Oct 12, 1999·51 cites·22 claims
- 0269US7704898B2Method for the thermal treatment of disk-shaped substratesMATTSON TECH INC·Filed 2004·Granted Apr 27, 2010·15 cites·34 claims
- 0368US8716153B2Device and method for producing dielectric layers in microwave plasmaLERCH WILFRIED·Filed 2009·Granted May 6, 2014·3 cites·14 claims
- 0439US2007098904A1Device and method for the reduction of particles in the thermal treatment of rotating substratesASCHNER HELMUT·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →