Inventor · disambiguated record
Tilmann Heil
Also filed as: HEIL TILMANN
6 granted patents·1 pending application·97 citations·filing 2004–2025
82Inventor score
Technology areasG03F
Top patents by PatentIndex Score
7 records- 0196US7345740B2Polarized radiation in lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Mar 18, 2008·65 cites·25 claims
- 0293US8325322B2Optical correction deviceHAUF MARKUS·Filed 2010·Granted Dec 4, 2012·16 cites·20 claims
- 0387US7800732B2Projection exposure method and projection exposure apparatus for microlithographyZEISS CARL SMT AG·Filed 2009·Granted Sep 21, 2010·9 cites·21 claims
- 0466US7999916B2Microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2008·Granted Aug 16, 2011·2 cites·21 claims
- 0560US2025208499A1Method, lithography mask, use of a lithography mask, and processing arrangementZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0658US7312852B2Polarized radiation in lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Dec 25, 2007·5 cites·29 claims
- 0755US7929116B2Polarized radiation in lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Apr 19, 2011·0 cites·24 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →