Inventor · disambiguated record
Tianhan Wang
Also filed as: Wang tianhan
2 granted patents·1 pending application·3 citations·filing 2017–2023
41Inventor score
Top patents by PatentIndex Score
3 records- 0186US11378451B2Bandgap measurements of patterned film stacks using spectroscopic metrologyKLA TENCOR CORP·Filed 2017·Granted Jul 5, 2022·3 cites·44 claims
- 0271US11796390B2Bandgap measurements of patterned film stacks using spectroscopic metrologyKLA CORP·Filed 2022·Granted Oct 24, 2023·0 cites·14 claims
- 0351US2024085321A1Methods And Systems For Model-less, Scatterometry Based Measurements Of Semiconductor StructuresKLA CORP·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →