Inventor · disambiguated record
Tim S. Wihl
Also filed as: WIHL TIM · WIHL TIM S
6 granted patents·858 citations·filing 1983–2010
88Inventor score
Top patents by PatentIndex Score
6 records- 0197US4532650APhotomask inspection apparatus and method using corner comparator defect detection algorithmKLA INSTR CORP·Filed 1983·Granted Jul 30, 1985·254 cites·25 claims
- 0295US4805123AAutomatic photomask and reticle inspection method and apparatus including improved defect detector and alignment sub-systemsKLA INSTR CORP·Filed 1986·Granted Feb 14, 1989·369 cites·52 claims
- 0391US7126699B1Systems and methods for multi-dimensional metrology and/or inspection of a specimenKLA TENCOR TECH CORP·Filed 2003·Granted Oct 24, 2006·91 cites·42 claims
- 0491US6917421B1Systems and methods for multi-dimensional inspection and/or metrology of a specimenKLA TENCOR TECH CORP·Filed 2002·Granted Jul 12, 2005·67 cites·20 claims
- 0586US4758094AProcess and apparatus for in-situ qualification of master patterns used in patterning systemsKLA INSTR CORP·Filed 1987·Granted Jul 19, 1988·72 cites·51 claims
- 0672US8629902B2Coordinate fusion and thickness calibration for semiconductor wafer edge inspectionLEWIS ISABELLA T·Filed 2010·Granted Jan 14, 2014·5 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →