Inventor · disambiguated record
Todd Robert Dunn
Also filed as: DUNN TODD · DUNN TODD ROBERT
32 granted patents·26 pending applications·4,871 citations·filing 2010–2025
98Inventor score
Top patents by PatentIndex Score
58 records- 0198US11501956B2Semiconductor reaction chamber showerheadASM IP HOLDING BV·Filed 2020·Granted Nov 15, 2022·5 cites·8 claims
- 0298US9574268B1Pulsed valve manifold for atomic layer depositionDUNN TODD·Filed 2011·Granted Feb 21, 2017·510 cites·40 claims
- 0398US9299595B2Susceptor heater and method of heating a substrateASM IP HOLDING BV·Filed 2014·Granted Mar 29, 2016·506 cites·22 claims
- 0498US9202727B2Susceptor heater shimDUNN TODD·Filed 2012·Granted Dec 1, 2015·524 cites·22 claims
- 0598US9005539B2Chamber sealing memberASM IP HOLDING BV·Filed 2012·Granted Apr 14, 2015·547 cites·23 claims
- 0698US8933375B2Susceptor heater and method of heating a substrateDUNN TODD·Filed 2012·Granted Jan 13, 2015·517 cites·26 claims
- 0797US10370761B2Pulsed valve manifold for atomic layer depositionASM INC·Filed 2017·Granted Aug 6, 2019·9 cites·20 claims
- 0897US10276355B2Multi-zone reactor, system including the reactor, and method of using the sameASM IP HOLDING BV·Filed 2015·Granted Apr 30, 2019·412 cites·27 claims
- 0997US9892908B2Process feed management for semiconductor substrate processingASM INC·Filed 2015·Granted Feb 13, 2018·479 cites·17 claims
- 1097US9340874B2Chamber sealing memberASM IP HOLDING BV·Filed 2015·Granted May 17, 2016·19 cites·23 claims
- 1196US9096931B2Deposition valve assembly and method of heating the sameYEDNAK III ANDREW M·Filed 2011·Granted Aug 4, 2015·536 cites·19 claims
- 1295US11404302B2Substrate susceptor using edge purgingASM IP HOLDING BV·Filed 2020·Granted Aug 2, 2022·4 cites·17 claims
- 1395US10714315B2Semiconductor reaction chamber showerheadASM IP HOLDING BV·Filed 2012·Granted Jul 14, 2020·12 cites·19 claims
- 1495US9017481B1Process feed management for semiconductor substrate processingPETTINGER FRED·Filed 2011·Granted Apr 28, 2015·761 cites·6 claims
- 1591US11781221B2Chemical source vessel with dip tubeASM IP HOLDING BV·Filed 2020·Granted Oct 10, 2023·2 cites·8 claims
- 1691US11626308B2Laser alignment fixture for a reactor systemASM IP HOLDING BV·Filed 2021·Granted Apr 11, 2023·3 cites·13 claims
- 1790US12406871B2Substrate susceptor using edge purgingASM IP HOLDING BV·Filed 2022·Granted Sep 2, 2025·1 cites·11 claims
- 1888US10832903B2Process feed management for semiconductor substrate processingASM IP HOLDING BV·Filed 2018·Granted Nov 10, 2020·4 cites·18 claims
- 1987US12297540B2Chemical source vessel with dip tubeASM IP HOLDING BV·Filed 2023·Granted May 13, 2025·0 cites·20 claims
- 2085US11629406B2Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrateASM IP HOLDING BV·Filed 2018·Granted Apr 18, 2023·3 cites·15 claims
- 2185US10683571B2Gas supply manifold and method of supplying gases to chamber using sameASM IP HOLDING BV·Filed 2014·Granted Jun 16, 2020·8 cites·20 claims
- 2280US11742189B2Multi-zone reactor, system including the reactor, and method of using the sameASM IP HOLDING BV·Filed 2019·Granted Aug 29, 2023·2 cites·6 claims
- 2379US11492701B2Reactor manifoldsASM IP HOLDING BV·Filed 2020·Granted Nov 8, 2022·1 cites·18 claims
- 2472US12472539B2Methods and apparatus for cleaning a vesselASM IP HOLDING BV·Filed 2023·Granted Nov 18, 2025·0 cites·11 claims
- 2571US12234552B2Semiconductor processing apparatus and methods for monitoring and controlling a semiconductor processing apparatusASM IP HOLDING BV·Filed 2023·Granted Feb 25, 2025·0 cites·20 claims
- 2669US11972969B2Laser alignment fixture for a reactor systemASM IP HOLDING BV·Filed 2023·Granted Apr 30, 2024·0 cites·20 claims
- 2767US2024401190A1Methods for depositing a film on a surface of a substrate by cyclical deposition methods including pulsed purge processesASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 2867US2024141486A1Apparatus for providing a gas mixture to a reaction chamber and method of using sameASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 2966US2025246466A1Alignment fixture for a reactor systemASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 3064US2024209505A1Solid precursor weight monitoring system, reactor system, and methods of using sameASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 3164US2024254629A1Semiconductor processing device with edge purgingASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 3263US8251818B1Reflex training and improvement systemDUNN TODD·Filed 2010·Granted Aug 28, 2012·6 cites·18 claims
- 3363US2023175127A1Remote solid source reactant delivery systems for vapor deposition reactorsASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 3462US2024133033A1Reactant delivery system and reactor system including sameASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 3561US2024218506A1Remote solid refill chamberASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 3659US2023183863A1Semiconductor processing device with heaterASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 3759US2025210407A1Apparatus for a substrate support with multi-zone controlASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 3858US12278129B2Alignment fixture for a reactor systemASM IP HOLDING BV·Filed 2021·Granted Apr 15, 2025·0 cites·16 claims
- 3956US2025079223A1Methods and apparatus for a susceptor assemblyASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 4056US2024401192A1Remote solid refill chamberASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 4155US2025383262A1Methods and apparatus for lift pin error detectionASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 4255US2024401194A1Method system and apparatus for remote solid refillASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 4354US2024191352A1Methods and apparatus for solid source refillASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 4454US2024162077A1Systems and apparatus for semiconductor equipmentASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 4553US2023234014A1Reactor system with source vessel weight monitoringASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 4652US2023061477A1Sealing system for a reactor systemASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 4752US2023207377A1Semiconductor processing device with wafer edge purgingASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 4851US2024249971A1Weighted lift pin constructions for semiconductor fabrication processingASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 4950US2022403516A1Reactor system and method for forming a layer comprising indium gallium zinc oxideASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 5049US2023203654A1Semiconductor substrate processing apparatus and the method thereofASM IP HOLDING BV·Filed 2022·Application pending·0 cites
Showing the top 50 of 58 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Todd Robert Dunn files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →