Inventor · disambiguated record
Tohru Ishitani
Also filed as: ISHITANI TOHRU · TAMURA HIFUMI
70 granted patents·5 pending applications·1,983 citations·filing 1976–2014
99Inventor score
Files withHITACHI LTD48HITACHI HIGH TECH CORP14SHICHI HIROYASU6HITACHI ULSI SYS CO LTD2ARAI NORIAKI1
Top patents by PatentIndex Score
75 records- 0199US6664552B2Method and apparatus for specimen fabricationHITACHI LTD·Filed 2001·Granted Dec 16, 2003·139 cites·2 claims
- 0299US5270552AMethod for separating specimen and method for analyzing the specimen separated by the specimen separating methodHITACHI LTD·Filed 1992·Granted Dec 14, 1993·247 cites·14 claims
- 0398US6734687B1Apparatus for detecting defect in device and method of detecting defectHITACHI LTD·Filed 2000·Granted May 11, 2004·134 cites·10 claims
- 0495US6822245B2Ion beam apparatus and sample processing methodHITACHI LTD·Filed 2001·Granted Nov 23, 2004·60 cites·25 claims
- 0595US6310341B1Projecting type charged particle microscope and projecting type substrate inspection systemHITACHI LTD·Filed 1999·Granted Oct 30, 2001·108 cites·27 claims
- 0694US8263943B2Ion beam deviceSHICHI HIROYASU·Filed 2010·Granted Sep 11, 2012·16 cites·20 claims
- 0794US8115184B2Gas field ion source, charged particle microscope, and apparatusSHICHI HIROYASU·Filed 2008·Granted Feb 14, 2012·20 cites·15 claims
- 0894US7897936B2Method and apparatus for specimen fabricationHITACHI LTD·Filed 2007·Granted Mar 1, 2011·15 cites·15 claims
- 0994US7084399B2Ion beam apparatus and sample processing methodHITACHI LTD·Filed 2004·Granted Aug 1, 2006·52 cites·19 claims
- 1094US5850326ANarrow track thin film magnetic head suitable for high density recording and reproducing operations and fabrication method thereof wherein an air bearing surface has at least one groove containing a non-magnetic electrically conductive layerHITACHI LTD·Filed 1994·Granted Dec 15, 1998·45 cites·77 claims
- 1194US4983540AMethod of manufacturing devices having superlattice structuresHITACHI LTD·Filed 1988·Granted Jan 8, 1991·123 cites·27 claims
- 1294US4936968AIon-beam machining method and apparatusHITACHI LTD·Filed 1989·Granted Jun 26, 1990·61 cites·17 claims
- 1393US4774414ALiquid metal ion sourceHITACHI LTD·Filed 1986·Granted Sep 27, 1988·56 cites·2 claims
- 1492US6960765B2Probe driving method, and probe apparatusHITACHI ULSI SYS CO LTD·Filed 2001·Granted Nov 1, 2005·50 cites·7 claims
- 1592US6794663B2Method and apparatus for specimen fabricationHITACHI LTD·Filed 2003·Granted Sep 21, 2004·33 cites·9 claims
- 1692US5656811AMethod for making specimen and apparatus thereofHITACHI LTD·Filed 1995·Granted Aug 12, 1997·138 cites·27 claims
- 1791US7928377B2Charged particle beam apparatus and sample manufacturing methodHITACHI HIGH TECH CORP·Filed 2005·Granted Apr 19, 2011·14 cites·13 claims
- 1891US7420181B2Liquid metal ion gunHITACHI HIGH TECH CORP·Filed 2007·Granted Sep 2, 2008·10 cites·13 claims
- 1991US4697086AApparatus for implanting ion microbeamHITACHI LTD·Filed 1984·Granted Sep 29, 1987·35 cites·2 claims
- 2090US7268356B2Method and apparatus for specimen fabricationHITACHI LTD·Filed 2004·Granted Sep 11, 2007·28 cites·13 claims
- 2189US7411192B2Focused ion beam apparatus and focused ion beam irradiation methodHITACHI HIGH TECH CORP·Filed 2005·Granted Aug 12, 2008·12 cites·28 claims
- 2289US4755685AIon micro beam apparatusHITACHI LTD·Filed 1986·Granted Jul 5, 1988·41 cites·7 claims
- 2388US7211805B2Liquid metal ion gunHITACHI HIGH TECH CORP·Filed 2005·Granted May 1, 2007·8 cites·3 claims
- 2487US7482586B2Methods for sample preparation and observation, charged particle apparatusHITACHI HIGH TECH CORP·Filed 2006·Granted Jan 27, 2009·10 cites·9 claims
- 2587US6839200B2Combination perpendicular magnetic head having shield material formed at both ends of an upper pole of a write elementHITACHI LTD·Filed 2003·Granted Jan 4, 2005·12 cites·2 claims
- 2687US6538844B2Method of fabricating a magnetic head by focused ion beam etchingHITACHI LTD·Filed 2002·Granted Mar 25, 2003·13 cites·5 claims
- 2786US7340111B2Image evaluation method and microscopeHITACHI LTD·Filed 2005·Granted Mar 4, 2008·6 cites·5 claims
- 2885US7236651B2Image evaluation method and microscopeHITACHI LTD·Filed 2002·Granted Jun 26, 2007·16 cites·20 claims
- 2985US6627889B2Apparatus and method for observing sample using electron beamHITACHI LTD·Filed 2002·Granted Sep 30, 2003·21 cites·4 claims
- 3084US7804073B2Liquid metal ion gunHITACHI HIGH TECH CORP·Filed 2008·Granted Sep 28, 2010·5 cites·13 claims
- 3183US7947964B2Charged particle beam orbit corrector and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted May 24, 2011·6 cites·18 claims
- 3283US7915581B2Methods for sample preparation and observation, charged particle apparatusHITACHI HIGH TECH CORP·Filed 2009·Granted Mar 29, 2011·6 cites·18 claims
- 3383US4710632AIon microbeam apparatusHITACHI LTD·Filed 1985·Granted Dec 1, 1987·28 cites·8 claims
- 3482US7005651B2Liquid metal ion gunHITACHI HIGH TECH CORP·Filed 2004·Granted Feb 28, 2006·12 cites·8 claims
- 3580US7186975B2Scanning charged-particle microscopeHITACHI LTD·Filed 2001·Granted Mar 6, 2007·15 cites·7 claims
- 3679US8563944B2Ion beam deviceSHICHI HIROYASU·Filed 2012·Granted Oct 22, 2013·3 cites·5 claims
- 3779US7301146B2Probe driving method, and probe apparatusHITACHI LTD·Filed 2005·Granted Nov 27, 2007·8 cites·16 claims
- 3879US5065034ACharged particle beam apparatusHITACHI LTD·Filed 1990·Granted Nov 12, 1991·39 cites·31 claims
- 3978US7805023B2Image evaluation method and microscopeHITACHI LTD·Filed 2007·Granted Sep 28, 2010·3 cites·20 claims
- 4078US7550740B2Focused ION beam apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted Jun 23, 2009·4 cites·16 claims
- 4178US7235798B2Focused ion beam apparatusHITACHI HIGH TECH CORP·Filed 2005·Granted Jun 26, 2007·4 cites·7 claims
- 4278US6970004B2Apparatus for inspecting defects of devices and method of inspecting defectsHITACHI ULSI SYS CO LTD·Filed 2004·Granted Nov 29, 2005·18 cites·8 claims
- 4378US4939364ASpecimen or substrate cutting method using focused charged particle beam and secondary ion spectroscopic analysis method utilizing the cutting methodHITACHI LTD·Filed 1988·Granted Jul 3, 1990·21 cites·15 claims
- 4477US8796651B2Method and apparatus for specimen fabricationSHICHI HIROYASU·Filed 2011·Granted Aug 5, 2014·2 cites·12 claims
- 4577US5399865ALiquid metal ion source with high temperature cleaning apparatus for cleaning the emitter and reservoirHITACHI LTD·Filed 1993·Granted Mar 21, 1995·30 cites·29 claims
- 4677US4680507ALiquid metal ion sourceHITACHI LTD·Filed 1984·Granted Jul 14, 1987·21 cites·7 claims
- 4774US8530865B2Gas field ion source, charged particle microscope, and apparatusSHICHI HIROYASU·Filed 2012·Granted Sep 10, 2013·2 cites·13 claims
- 4873US5113072ADevice having superlattice structure, and method of and apparatus for manufacturing the sameHITACHI LTD·Filed 1990·Granted May 12, 1992·48 cites·33 claims
- 4970US6307707B1Narrow track thin film head including magnetic poles machined by focused ion beam etchingHITACHI LTD·Filed 2000·Granted Oct 23, 2001·4 cites·5 claims
- 5070US6278578B1Narrow track thin film head having a focused ion beam etched air bearing surfaceHITACHI LTD·Filed 2000·Granted Aug 21, 2001·4 cites·4 claims
Showing the top 50 of 75 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →