Inventor · disambiguated record
Torsten R. Kaack
Also filed as: KAACK TORSTEN · KAACK TORSTEN R · KAACK TORSTEN RUDOLF
14 granted patents·70 citations·filing 2004–2022
89Inventor score
Top patents by PatentIndex Score
14 records- 0187US7349079B2Methods for measurement or analysis of a nitrogen concentration of a specimenKLA TENCOR TECH CORP·Filed 2004·Granted Mar 25, 2008·37 cites·17 claims
- 0286US11378451B2Bandgap measurements of patterned film stacks using spectroscopic metrologyKLA TENCOR CORP·Filed 2017·Granted Jul 5, 2022·3 cites·44 claims
- 0383US8711349B2High throughput thin film characterization and defect detectionKLA TENCOR CORP·Filed 2012·Granted Apr 29, 2014·8 cites·21 claims
- 0480US8830486B2Atmospheric molecular contamination control with local purgingKWAK HIDONG·Filed 2012·Granted Sep 9, 2014·6 cites·7 claims
- 0575US10190868B2Metrology system, method, and computer program product employing automatic transitioning between utilizing a library and utilizing regression for measurement processingKLA TENCOR CORP·Filed 2015·Granted Jan 29, 2019·2 cites·11 claims
- 0675US9625823B1Calculation method for local film stress measurements using local film thickness valuesKAACK TORSTEN R·Filed 2011·Granted Apr 18, 2017·7 cites·19 claims
- 0771US11796390B2Bandgap measurements of patterned film stacks using spectroscopic metrologyKLA CORP·Filed 2022·Granted Oct 24, 2023·0 cites·14 claims
- 0870US9553033B2Semiconductor device models including re-usable sub-structuresKLA TENCOR CORP·Filed 2015·Granted Jan 24, 2017·2 cites·20 claims
- 0970US9046474B2Multi-analyzer angle spectroscopic ellipsometryKWAK HIDONG·Filed 2012·Granted Jun 2, 2015·2 cites·18 claims
- 1060US9442063B2Measurement of composition for thin filmsDi ming·Filed 2012·Granted Sep 13, 2016·1 cites·33 claims
- 1159US10088413B2Spectral matching based calibrationKLA TENCOR CORP·Filed 2012·Granted Oct 2, 2018·1 cites·23 claims
- 1259US7453562B1Ellipsometry measurement and analysisKLA TENCOR CORP·Filed 2007·Granted Nov 18, 2008·1 cites·20 claims
- 1351US9110020B2Atmospheric molecular contamination control with local purgingKLA TENCOR CORP·Filed 2014·Granted Aug 18, 2015·0 cites·9 claims
- 1447US7903250B1Control by sample reflectivityKLA TENCOR CORP·Filed 2009·Granted Mar 8, 2011·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →