Inventor · disambiguated record
Toshiyuki Makabe
Also filed as: MAKABE TOSHIYUKI
5 granted patents·4 pending applications·26 citations·filing 2009–2025
75Inventor score
Technology areasH10P
Top patents by PatentIndex Score
9 records- 0191US8981263B2Electrostatic chuck apparatusSASAKI YASUHARU·Filed 2010·Granted Mar 17, 2015·15 cites·11 claims
- 0280US9721822B2Electrostatic chuck apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Aug 1, 2017·3 cites·20 claims
- 0377US9410753B2Substrate temperature adjusting method and a method of changing the temperature control range of a heater in a substrate processing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Aug 9, 2016·5 cites·4 claims
- 0473US2025054793A1Substrate processing system and transfer methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0571US10714370B2Mounting table and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Jul 14, 2020·3 cites·13 claims
- 0667US12165893B2Substrate processing system and transfer methodTOKYO ELECTRON LTD·Filed 2023·Granted Dec 10, 2024·0 cites·21 claims
- 0750US2025232965A1Substrate processing systemTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0849US2022243336A1Storage container and processing systemTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0945US2010122774A1Substrate mounting table and substrate processing apparatus having sameTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →