Inventor · disambiguated record
Toshifumi Nagaiwa
Also filed as: NAGAIWA TOSHIFUMI
10 granted patents·4 pending applications·140 citations·filing 2001–2020
84Inventor score
Top patents by PatentIndex Score
14 records- 0193US6723202B2Worktable device and plasma processing apparatus for semiconductor processTOKYO ELECTRON LTD·Filed 2001·Granted Apr 20, 2004·124 cites·16 claims
- 0282US8277673B2Plasma processing method and apparatusTSUJIMOTO HIROSHI·Filed 2009·Granted Oct 2, 2012·10 cites·10 claims
- 0373US10714318B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Jul 14, 2020·1 cites·16 claims
- 0471US7732340B2Method for adjusting a critical dimension in a high aspect ratio featureTOKYO ELECTRON LTD·Filed 2006·Granted Jun 8, 2010·5 cites·16 claims
- 0566US11342165B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2020·Granted May 24, 2022·0 cites·13 claims
- 0654US10991551B2Cleaning method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Apr 27, 2021·0 cites·17 claims
- 0752US2008156441A1Plasma processing apparatus and electrode plate, electrode supporting body, and shield ring thereofTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 0848US11264208B2Plasma processing apparatus and method for controlling radio-frequency power supply of plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Mar 1, 2022·0 cites·9 claims
- 0948US2009242128A1Plasma processing apparatus and methodTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 1046US2010041240A1Focus ring, plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 1145US11610766B2Target object processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Mar 21, 2023·0 cites·16 claims
- 1243US11171007B2Plasma processing apparatus and plasma etching methodTOKYO ELECTRON LTD·Filed 2019·Granted Nov 9, 2021·0 cites·12 claims
- 1340US2003155078A1Plasma processing apparatus, and electrode plate, electrode supporting body, and shield ring thereofTOKYO ELECTRON LTD·Filed 2003·Application pending·0 cites
- 1439US9059103B2Processing method and storage mediumSHIMIZU WATARU·Filed 2012·Granted Jun 16, 2015·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →