Inventor · disambiguated record
Tom Stevenson
Also filed as: STEVENSON TOM · STEVENSON TOM D
13 granted patents·6 pending applications·88 citations·filing 1995–2017
91Inventor score
Top patents by PatentIndex Score
19 records- 0194US9873940B2Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatusLAM RES CORP·Filed 2014·Granted Jan 23, 2018·16 cites·9 claims
- 0290US8701268B2Composite showerhead electrode assembly for a plasma processing apparatusLAM RES CORP·Filed 2013·Granted Apr 22, 2014·10 cites·21 claims
- 0389US8449786B2Film adhesive for semiconductor vacuum processing apparatusLARSON DEAN J·Filed 2008·Granted May 28, 2013·15 cites·16 claims
- 0484US9123651B2Dense oxide coated component of a plasma processing chamber and method of manufacture thereofLAM RES CORP·Filed 2013·Granted Sep 1, 2015·6 cites·12 claims
- 0581US9546432B2Dense oxide coated component of a plasma processing chamber and method of manufacture thereofLAM RES CORP·Filed 2015·Granted Jan 17, 2017·3 cites·10 claims
- 0680US8529729B2Plasma processing chamber component having adaptive thermal conductorSTEVENSON TOM·Filed 2010·Granted Sep 10, 2013·6 cites·15 claims
- 0779US8679288B2Showerhead electrode assemblies for plasma processing apparatusesSTEVENSON TOM·Filed 2008·Granted Mar 25, 2014·6 cites·17 claims
- 0877US8418649B2Composite showerhead electrode assembly for a plasma processing apparatusLARSON DEAN JAY·Filed 2008·Granted Apr 16, 2013·7 cites·12 claims
- 0974US9899228B2Showerhead electrode assemblies for plasma processing apparatusesLAM RES CORP·Filed 2014·Granted Feb 20, 2018·2 cites·20 claims
- 1070US8975817B2Pressure controlled heat pipe temperature control plateLAM RES CORP·Filed 2012·Granted Mar 10, 2015·2 cites·20 claims
- 1164US2018127868A1Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatusLAM RES CORP·Filed 2017·Application pending·0 cites
- 1259US5588713AProcess for making sodium bicarbonate from Nahcolite-rich solutionsFiled 1995·Granted Dec 31, 1996·15 cites·12 claims
- 1353US9028646B2Film adhesive for semiconductor vacuum processing apparatusLAM RES CORP·Filed 2013·Granted May 12, 2015·0 cites·18 claims
- 1451US2015289475A1Pet Spa ChairSTEVENSON TOM·Filed 2014·Application pending·0 cites
- 1551US2015201580A1Pet Carrier With Geometric-shaped Porthole WindowSTEVENSON TOM·Filed 2014·Application pending·0 cites
- 1648US2011024049A1Light-up prevention in electrostatic chucksC O LAM RES CORP·Filed 2009·Application pending·0 cites
- 1742US2013102156A1Components of plasma processing chambers having textured plasma resistant coatingsLAM RES CORP·Filed 2012·Application pending·0 cites
- 1842US2015187615A1Component of a plasma processing apparatus including an electrically conductive and nonmagnetic cold sprayed coatingLAM RES CORP·Filed 2014·Application pending·0 cites
- 1926US8906164B2Methods for stabilizing contact surfaces of electrostatic chucksKIMBALL CHRIS·Filed 2010·Granted Dec 9, 2014·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →