Inventor · disambiguated record
Tzahi Grunzweig
Also filed as: GRUNZWEIG TZAHI
11 granted patents·39 citations·filing 2014–2022
86Inventor score
Top patents by PatentIndex Score
11 records- 0192US9851300B1Decreasing inaccuracy due to non-periodic effects on scatterometric signalsKLA TENCOR CORP·Filed 2015·Granted Dec 26, 2017·12 cites·20 claims
- 0290US10527952B2Fault discrimination and calibration of scatterometry overlay targetsKLA TENCOR CORP·Filed 2017·Granted Jan 7, 2020·13 cites·26 claims
- 0390US10209183B2Scatterometry system and method for generating non-overlapping and non-truncated diffraction imagesKLA TENCOR CORP·Filed 2017·Granted Feb 19, 2019·4 cites·24 claims
- 0489US9903711B2Feed forward of metrology data in a metrology systemKLA TENCOR CORP·Filed 2016·Granted Feb 27, 2018·5 cites·33 claims
- 0586US10365230B1Scatterometry overlay based on reflection peak locationsKLA TENCOR CORP·Filed 2015·Granted Jul 30, 2019·3 cites·13 claims
- 0676US9719920B2Scatterometry system and method for generating non-overlapping and non-truncated diffraction imagesKLA TENCOR CORP·Filed 2014·Granted Aug 1, 2017·2 cites·36 claims
- 0753US12088617B1Network monitor with a homodyne detector for early identification of network attacksCPACKET NETWORKS INC·Filed 2022·Granted Sep 10, 2024·0 cites·7 claims
- 0846US11615974B2Fab management with dynamic sampling plans, optimized wafer measurement paths and optimized wafer transport, using quantum computingKLA CORP·Filed 2019·Granted Mar 28, 2023·0 cites·30 claims
- 0943US10761022B2Rotated boundaries of stops and targetsKLA TENCOR CORP·Filed 2016·Granted Sep 1, 2020·0 cites·21 claims
- 1043US10565697B2Utilizing overlay misregistration error estimations in imaging overlay metrologyKLA TENCOR CORP·Filed 2017·Granted Feb 18, 2020·0 cites·22 claims
- 1139US10379449B2Identifying process variations during product manufactureKLA TENCOR CORP·Filed 2018·Granted Aug 13, 2019·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →